Palladium film hydrogen sensor

Abstract

The invention discloses a palladium film hydrogen sensor, which comprises a silicon substrate, an insulating layer, at least one silicon groove, a palladium alloy film assembly, a shielding layer and a temperature control assembly. The palladium alloy film assembly comprises a first palladium alloy film and a second palladium alloy film which are symmetrically arranged; the shielding layer is located on the insulating layer and is further provided with an absorption window, and the absorption window corresponds to the first palladium alloy film and is used for enabling the first palladium alloy film to make contact with hydrogen; the temperature control assembly comprises a heating coil and a temperature measuring coil, the temperature measuring coil is used for detecting the temperature around the palladium alloy film assembly, and the heating coil is used for increasing the temperature around the palladium alloy film assembly; and the silicon groove is matched with the insulating layer to preserve heat of the palladium alloy film assembly. According to the invention, palladium alloy with high sensitivity to hydrogen is adopted, and meanwhile, a Wheatstone bridge is introduced, so that the detection precision is greatly improved; the special three-dimensional structure greatly improves the thermal response speed, the thermal insulation effect is good, and the sensitivity is high.

Description

technical field [0001] The invention relates to the technical field of hydrogen sensors, in particular to a palladium thin-film hydrogen sensor. Background technique [0002] In the construction of UHV lines, oil-filled voltage transformer bushings and current transformer bushings are widely used in the connection between transformers and lines. When the oil-filled voltage transformer bushing and current transformer bushing are working, due to the dynamic change of the grid load, the temperature will rise rapidly within 3 to 5 minutes, resulting in the cracking of the insulating medium-insulator oil to produce some characteristic gases. If the gas content of the insulating oil in the bushing is too high, especially if the hydrogen content exceeds the standard, the aging of the insulating oil will be accelerated, the service life of the insulating material will be halved, and the effect of heat dissipation and cooling will not be achieved; therefore, early detection of whethe...

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Problems solved by technology

If the gas content of the insulating oil in the bushing is too high, especially if the hydrogen content exceeds the standard, the aging of the insulating oil will be accelerated, the service life of the insulating material will be halved, and the effect of heat dissipation and cooling will not be achieved; therefore, early detection of whether the inside of the bushing is Partial discharge is very important to safety, if there is partial discharge, it will cause insulation damage and even cause accidents

[0003] At present, the measurement of hydrogen in the power grid mainly adopts the method of extracting insulating oil at the oil intake port and bringing it back for analysis to determine the quality of the insulating oil; however, the oil extraction method is time-consuming and labor-intensive, and cannot continuously measure the state of the bushing , Moreover, repeated oil extraction will reduce the insulating oil, so the bushing needs to be supplemented with oil in the follow-up; and the structural support of the bushing is weak, and it is impossible to use the equipment based on the principle of chromatography for on-site measurement

[0004] In the prior art, a hydrogen sensor can be used to solve the problem of continuous detection, but the hydrogen sensor needs to work at a certain temperature. When faced with a scene similar to the above-mentioned temperature that rises rapidly within 3 to 5 minutes, the hydrogen sensor will respond quickly. There is a delay in the response to changing ambient temperature, which causes the hydrogen concentration detected by the hydrogen sensor to not correspond to the ambient temperature at that time, but is based on the hydrogen concentration detected by the ambient temperature at the previous moment, thus causing the hydrogen sensor to Inaccurate detection of hydrogen concentration

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