Method for removing frame glue and device for removing frame glue

A frame glue and aluminum frame technology, applied in the field of mask plate production, can solve the problems such as the difficulty of recycling mask plates, achieve the effect of shortening the removal time, reducing the pressure of environmental protection, and simple methods

Pending Publication Date: 2021-05-11
合肥清溢光电有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of this application is to provide a method for removing the sealant, aiming to solve the technical problem that it is not easy to recycle the mask plate in the prior art

Method used

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  • Method for removing frame glue and device for removing frame glue

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Embodiment Construction

[0021] Embodiments of the present application are described in detail below, and examples of the embodiments are shown in the drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. Attached below by reference figure 1 The described embodiments are exemplary and are intended to explain the present application, but should not be construed as limiting the present application.

[0022] In the description of the present application, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", The orientation or positional relationship indicated by "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the application and simplifying the description, rather than Nothing to indicate or imply that a refe...

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Abstract

The invention belongs to the technical field of mask production, and particularly relates to a method for removing frame glue and a device for removing the frame glue. According to the method for removing the frame glue, the mask plate and the aluminum frame are fixed in advance, then the aluminum frame is separated through the cutting tool, and then the polyethylene frame glue is scraped through the scraping tool. Specifically, the cutting edge of the scraping cutter is flush with the upper surface of the mask, so that in the cutting process of the scraping cutter, the scraping cutter does not damage the mask and does not affect secondary regeneration of the mask supported by the quartz substrate. The method used in the method is simple and effective, the time for removing the frame glue is greatly shortened, no organic solvent is used, and the environmental protection pressure is reduced.

Description

technical field [0001] The application belongs to the technical field of mask plate production, and in particular relates to a method for removing frame glue and a device for removing frame glue. Background technique [0002] Photomask, also known as mask or MASK, is a graphic transfer tool or template used in the microelectronics manufacturing process. Through the processes of exposure, development and etching, the required microscopic graphics are produced on the glass chrome plate, which is mainly used in microelectronic lithography. The raw material used to make the mask is chromium, which is a hard-face mask material, that is, the mask base, which is deposited on a flat, high-gloss glass substrate by DC magnetron sputtering A chromium-chromium oxide film is applied to form a chromium film base plate, and then a layer of photoresist (also known as photoresist) is coated on it to make a chromium plate raw material. After exposure, development, etching, stripping and oth...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F1/82G03F1/62
CPCG03F1/82G03F1/62
Inventor 赵冬生
Owner 合肥清溢光电有限公司
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