Metal mask frame surface burr removing equipment

A metal mask and burr removal technology, which is applied in metal processing equipment, grinding/polishing equipment, grinding racks, etc., can solve the problems of general grinding efficiency, achieve the effect of convenient grinding and ensure smooth progress

Active Publication Date: 2021-05-25
江苏高光半导体材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003]The traditional metal mask frame grinding design is relatively simple. In actual use, personnel need to hold the gr

Method used

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  • Metal mask frame surface burr removing equipment
  • Metal mask frame surface burr removing equipment
  • Metal mask frame surface burr removing equipment

Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0027]Example 1

[0028]ReferFigure 1-4, A metal mask version of the surface of the frame, including the bottom plate 1, and the top outer wall of the bottom plate 1 secures the support ring 21 by bolt, characterized in that the top end of the support ring 21 is provided with a driven rotor 22, and The outer wall is welded from the mid-end circumference of the driving cartridge 22, and the side ring plate 20 and the opposite side of the side ring plate 21 have a ring groove 6, and the inner wall of the two annular grooves 6 is rolled, etc. The outer wall of the distance distributed, the top end of the support ring plate 21 is fixed by bolt, and the bottom outer wall of the platen 23 opens a mounting groove, the inner wall of the mounting groove is fixed to the electromagnet 24, the top of the bottom plate 1 The mounting terminal frame is fixed by the bolt, and the mounting terminal frame is rotated by the bearing to connect the threaded wire rod 16, and one end of the threaded wire rod...

Example Embodiment

[0039]Example 2

[0040]ReferFigure 1-4, A metal mask version of the frame surface glitch removal method, which uses a metal mask version of the frame surface glitch removal device, which includes a bottom plate 1, and the top outer wall of the bottom plate 1 is fixed to a support ring plate 21 by a bolt, and a support ring plate The top end of 21 is provided from the moving cartridge 22, and the outer ring 20 is welded from the mid-end circumference of the moving cartridge 22, and the opposite side of the side ring plate 20 and the support ring plate 21 has a ring slot 6, and The inner wall of the two annular grooves 6 is rolled to connect the equal distance distribution ball 5, and the top end of the top end of the support ring plate 21 is fixed to the table plate 23, and the bottom outer wall of the platen 23 opens the mounting groove, the inner wall of the mounting tank passes The bolt is fixedly magnetized 24, and the top outer wall of the bottom plate 1 is fixed to the mounting e...

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PUM

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Abstract

The invention belongs to the technical field of industrial machining, and particularly relates to metal mask frame surface burr removing equipment. The metal mask frame surface burr removing equipment comprises a bottom plate, and a supporting ring plate is fixed to the outer wall of the top of the bottom plate through bolts. The metal mask frame surface burr removing equipment is characterized in that a driven rotating cylinder is arranged at the top end of the supporting ring plate, and an edge ring plate is welded to the outer wall of the circumference of the middle end of the driven rotating cylinder; and annular grooves are formed in the opposite sides of the edge ring plate and the supporting ring plate, balls distributed at equal intervals are connected to the inner walls of the two corresponding annular grooves in a rolling mode, and a table plate is fixed to the outer wall of the top end of the supporting ring plate through bolts. According to the metal mask frame surface burr removing equipment, through an arranged driving motor, a driven rotary drum and the table plate can be driven to rotate through the transmission effect of a driving gear and an inner gear ring, and therefore the grinding position is effectively changed; and an arranged servo motor can drive a threaded lead screw to rotate, so that a movable end block is driven to move under the action of a limiting sliding block, the position of a polisher is adjusted, and all-directional polishing treatment on a workpiece is facilitated.

Description

technical field [0001] The invention relates to the technical field of industrial processing, in particular to a device for removing burrs on the surface of a metal mask frame. Background technique [0002] A chip refers to an integrated circuit that manufactures a circuit on the surface of a semiconductor chip, also known as a thin-film integrated circuit. Another thick-film integrated circuit is a miniaturized circuit composed of independent semiconductor devices and passive components integrated into a substrate or circuit board. . Modern computing, communication, manufacturing and transportation systems, including the Internet, all rely on the existence of integrated circuits. In chip manufacturing, a mask is a photomask. It can be understood as a film containing chip layout information. After exposure, the layout in the mask is engraved on the wafer. The photomask base plate is an ideal photosensitive blank plate for making fine photomask patterns, and the required p...

Claims

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Application Information

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IPC IPC(8): B24B9/04B24B55/06B24B47/04B24B41/06B24B41/02
CPCB24B9/04B24B55/06B24B47/04B24B41/06B24B41/02Y02P70/10
Inventor 钱超杨波洪明王有明
Owner 江苏高光半导体材料有限公司
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