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Metal mask frame surface burr removing equipment

A metal mask and burr removal technology, which is applied in metal processing equipment, grinding/polishing equipment, grinding racks, etc., can solve the problems of general grinding efficiency, achieve the effect of convenient grinding and ensure smooth progress

Active Publication Date: 2021-05-25
江苏高光半导体材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003]The traditional metal mask frame grinding design is relatively simple. In actual use, personnel need to hold the grinder and frequently adjust the grinding position. The efficiency is relatively general, so there are certain limitations

Method used

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  • Metal mask frame surface burr removing equipment
  • Metal mask frame surface burr removing equipment
  • Metal mask frame surface burr removing equipment

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] refer to Figure 1-4 , a metal mask frame surface burr removal equipment, including a base plate 1, the top outer wall of the base plate 1 is fixed with a ring support plate 21 by bolts, it is characterized in that a driven drum 22 is arranged on the top of the support ring plate 21, and The outer wall of the middle end of the driven drum 22 is welded with a side ring plate 20, and the opposite side of the side ring plate 20 and the support ring plate 21 is provided with an annular groove 6, and the inner walls of the corresponding two annular grooves 6 are rollingly connected with etc. The distance distribution balls 5, the top outer wall of the ring support plate 21 is fixed with a platen 23 by bolts, and the bottom outer wall of the platen 23 has a mounting groove, the inner wall of the mounting groove is fixed with an electromagnet 24 by bolts, and the top outer wall of the bottom plate 1 The mounting end frame is fixed by bolts, and the end of the mounting end fram...

Embodiment 2

[0040] refer to Figure 1-4, a metal mask frame surface burr removal method, which uses a metal mask frame surface burr removal equipment, the device includes a base plate 1, the top outer wall of the base plate 1 is fixed with a ring support plate 21 by bolts, and the ring support plate The top of 21 is provided with a driven drum 22, and the outer wall of the middle end of the driven drum 22 is welded with a side ring plate 20, and the opposite side of the side ring plate 20 and the ring support plate 21 is provided with an annular groove 6, and Corresponding to the inner walls of the two annular grooves 6, there are balls 5 distributed equidistantly in rolling connection. The top outer wall of the support ring plate 21 is fixed with a platen 23 by bolts, and the bottom outer wall of the platen 23 is provided with a mounting groove, and the inner wall of the mounting groove passes through Bolts are fixed with electromagnet 24, and the top outer wall of bottom plate 1 is fixe...

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Abstract

The invention belongs to the technical field of industrial machining, and particularly relates to metal mask frame surface burr removing equipment. The metal mask frame surface burr removing equipment comprises a bottom plate, and a supporting ring plate is fixed to the outer wall of the top of the bottom plate through bolts. The metal mask frame surface burr removing equipment is characterized in that a driven rotating cylinder is arranged at the top end of the supporting ring plate, and an edge ring plate is welded to the outer wall of the circumference of the middle end of the driven rotating cylinder; and annular grooves are formed in the opposite sides of the edge ring plate and the supporting ring plate, balls distributed at equal intervals are connected to the inner walls of the two corresponding annular grooves in a rolling mode, and a table plate is fixed to the outer wall of the top end of the supporting ring plate through bolts. According to the metal mask frame surface burr removing equipment, through an arranged driving motor, a driven rotary drum and the table plate can be driven to rotate through the transmission effect of a driving gear and an inner gear ring, and therefore the grinding position is effectively changed; and an arranged servo motor can drive a threaded lead screw to rotate, so that a movable end block is driven to move under the action of a limiting sliding block, the position of a polisher is adjusted, and all-directional polishing treatment on a workpiece is facilitated.

Description

technical field [0001] The invention relates to the technical field of industrial processing, in particular to a device for removing burrs on the surface of a metal mask frame. Background technique [0002] A chip refers to an integrated circuit that manufactures a circuit on the surface of a semiconductor chip, also known as a thin-film integrated circuit. Another thick-film integrated circuit is a miniaturized circuit composed of independent semiconductor devices and passive components integrated into a substrate or circuit board. . Modern computing, communication, manufacturing and transportation systems, including the Internet, all rely on the existence of integrated circuits. In chip manufacturing, a mask is a photomask. It can be understood as a film containing chip layout information. After exposure, the layout in the mask is engraved on the wafer. The photomask base plate is an ideal photosensitive blank plate for making fine photomask patterns, and the required p...

Claims

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Application Information

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IPC IPC(8): B24B9/04B24B55/06B24B47/04B24B41/06B24B41/02
CPCB24B9/04B24B55/06B24B47/04B24B41/06B24B41/02Y02P70/10
Inventor 钱超杨波洪明王有明
Owner 江苏高光半导体材料有限公司
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