Color film layer
A color film layer, coating technology, applied in the direction of coating, superimposed layer coating, metal material coating process, etc.
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment
[0093] The invention is illustrated by the following examples:
[0094] A sputtering device with a silicon target as the source body is used to coat the thin substrate under the action of nitrogen and oxygen reaction gases.
[0095] Thin substrates are rinsed in deionized water outside the chamber, then introduced into the chamber and evacuated to operating pressure. The thin substrate is then ion cleaned. Then coat the following film material and film thickness on the clean thin substrate surface. The wafer substrates in the chamber are polished stainless steel sheets, and the final step is to apply the AFP coating before leaving the chamber. Use conventional equipment to test the coating color, its parameters L, a and b, the results are shown in Table 1.
[0096] Table 1
[0097]
[0098] The film thickness refers to the required thickness input into the sputtering device by the program. In practice, there may be a tolerance of plus or minus 1-2nm in the actual thic...
PUM
| Property | Measurement | Unit |
|---|---|---|
| Thickness | aaaaa | aaaaa |
| Thickness | aaaaa | aaaaa |
| Thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
Login to View More 


