mems micromirror, Michelson interference system and optical system

Abstract

Disclosed are a MEMS micromirror, a Michelson interference system and an optical system. The MEMS micromirror includes a substrate and a mirror surface structure, the mirror surface is located on one side of the substrate, and the first surface of the MEMS micromirror is connected to the first surface of the substrate. A gap is formed between them, wherein the incident light emitted by the light source is irradiated on the second surface of the substrate, the first part of the incident light is reflected by the second surface of the substrate to form the first reflected light, and the second part of the incident light passes through the second surface of the mirror structure. A surface is reflected to form the second reflected light, and the first reflected light and the second reflected light are coupled to form the first interference light. The interference system is based on the characteristics of the surface reflection of the MEMS chip and the surface reflection of its substrate. The light reflected by the immobile substrate in the MEMS micromirror is coupled with the light reflected by the moving mirror structure to form an interference light path, which meets the interference requirements of the Michelson system. Furthermore, the arrangement of the fixed mirror is reduced, the optical path assembly efficiency of the interference system is effectively improved, and the cost of the optical structure is greatly reduced.

Description

technical field [0001] The invention relates to the field of optical design of microelectromechanical systems, in particular to a MEMS micromirror, a Michelson interference system and an optical system. Background technique [0002] MEMS (Microelectro Mechanical Systems, Micro Electro Mechanical Systems) devices are widely used in communication, micro optoelectronic devices, display and other fields due to their excellent characteristics, such as making micro projectors, micro spectrometers, optical tomography endoscopy Mirror imaging scanning, optical switching, optical attenuator, etc. [0003] The time-modulated Fourier transform spectrometer is an optical system based on the Michelson interference system. At present, the most typical Michelson interference structure is composed of a moving mirror, a fixed mirror, and a beam splitting prism, and the moving mirror can use the above-mentioned MEMS devices. When the collimated incident light is split by the beam splitting p...

AI Technical Summary

Problems solved by technology

However, due to the non-uniform motion of the moving mirror, a laser is usually added to the optical system of the spectrometer to calibrate the movement trajectory of the moving mirror. Therefore, the size of the traditional interference platform is relatively large, and there are many devices that need to be assembled and aligned. The assembly and debugging process The operation is more complicated, the adjustment accuracy is not high, and the price is relatively high

The traditional spectrometer and interferometer are difficult to operate, and the structure of the interferometer and spectrometer needs to be further improved

Images