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Substrate pretreatment device and method for removing impurity particles of Micro OLED

A substrate and impurity technology, which is applied in the field of MicroOLED display, can solve problems such as loss of yield rate and poor Particle, and achieve the effect of reducing impurity particles, tight interface contact, and improving product yield

Active Publication Date: 2021-05-28
ANHUI SEMICON INTEGRATED DISPLAY TECH CO LTD
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  • Description
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Problems solved by technology

[0003] In the process of realizing the present invention, the inventors found that the prior art has at least the following problems: Since MicroOLED sub-pixels and line width and line spacing are very small (0.1-0.8um), the control of Particles (impurity particles) is very strict, extremely small Particle will bring bad, loss of yield

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  • Substrate pretreatment device and method for removing impurity particles of Micro OLED
  • Substrate pretreatment device and method for removing impurity particles of Micro OLED

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Embodiment Construction

[0026] In order to make the object, technical solution and advantages of the present invention clearer, the implementation manner of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0027] see Figure 1-2 , a substrate pretreatment device for Micro OLED to remove impurity particles, which has:

[0028] A surface treatment module capable of emitting a plasma stream to the substrate;

[0029] The charging module can add charges to the impurity particles on the substrate;

[0030] The magnetic field module can apply electromagnetic force to the charged impurity particles on the substrate;

[0031] The conveying mechanism can transport the substrate in the surface treatment module, the charging module and the magnetic field module; the substrate can reciprocate between the charging module and the magnetic field module.

[0032] The surface treatment module is a plasma cavity, and the plasma flow can be emitted towa...

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Abstract

The invention discloses a substrate pretreatment device and method for removing impurity particles of a Micro OLED, and the device comprises a surface treatment module which can emit a plasma flow to a substrate; an energizing module capable of adding charges to impurity particles on the substrate; a magnetic field module which can apply electromagnetic force to the charged impurity particles on the substrate; and a conveying mechanism which can convey the substrate in the surface treatment module, the energizing module and the magnetic field module. The substrate can reciprocate between the energizing module and the magnetic field module, impurity particles on the surface of the substrate are reduced, the product yield is improved, meanwhile, the surface energy of the substrate can be reduced while charges are applied to the surface of the substrate, and the subsequent interface contact is tighter.

Description

technical field [0001] The invention belongs to the field of Micro OLED display, and in particular relates to a substrate pretreatment device and a treatment method for removing impurity particles from a Micro OLED. Background technique [0002] With the advancement of technology and the development of technology, people also have a higher demand for the experience of pursuing display effects. In addition, wearing supporting display devices makes the method path in the physical sense feasible. The arrival of the 5G era will solve the problem of data transmission. Therefore, Micro OLED (Organic Light Emitting Display) has been called the dark horse of next-generation display technology in recent years. It has been widely used in military markets such as machine-mounted helmets, gun sights, and night vision devices. With the application of new technologies such as driving, Micro OLED microdisplays will usher in explosive growth. [0003] In the process of realizing the presen...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L51/56B03C1/30
CPCB03C1/30H10K71/00
Inventor 李雪原邱天霜郭向阳林挺刘胜芳赵铮涛
Owner ANHUI SEMICON INTEGRATED DISPLAY TECH CO LTD
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