Double-layer micro-channel heat dissipation device based on gas-liquid separation
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- XI AN JIAOTONG UNIV
- Publication Date
- 2021-06-01
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Abstract
Description
technical field
[0001] The invention relates to the field of cooling and heat dissipation in tiny spaces, is applicable to ultra-high heat flux heat dissipation technology, and particularly relates to a double-layer micro-channel heat dissipation device based on gas-liquid separation. Background technique
[0002] With the rapid development of MEMS / NEMS technology and 3D-IC packaging technology, the miniaturization and integration of electronic devices are higher. At the same time, they are also facing the dual challenges of high heat flux density and local ultra-high heat flux density. In recent years, people have proposed a variety of new cooling technologies to improve the reliability of materials and equipment, including: micro-channel cooling, spray cooling, piezoelectric cooling, jet cooling, heat pipes and other methods. Among them, microchannel cooling technology has become a research hotspot due to its strong heat transfer capacity, compactness, and heat transfer un...