An all-solid-state RF power supply with a wide load range

Abstract

The invention discloses an all-solid-state radio frequency power supply with a wide load range, which specifically includes a power amplification unit, a dynamic impedance transformation unit, a dynamic impedance compression network and an equivalent variable load; The two-stage scaling function of the compression network can compress the wide-range variable load to a small variable range, greatly weakening the impact on the shaping capacitor parameters when the load changes, thus ensuring the zero-voltage switching working conditions of the power amplifier unit E-class power amplifier, making The all-solid-state RF power supply with wide load range can output efficiently at high power, and can output stably at low power.

Description

technical field [0001] The invention belongs to the technical field of solid-state radio frequency power supply, and more specifically relates to an all-solid-state radio frequency power supply with a wide load range. Background technique [0002] With the development of semiconductor device materials, RF power has also entered the era of solid-state RF power from electronic tube RF power. In ICP (Inductively Coupled Plasma)-related applications, high-performance solid-state radio frequency power supplies are generally used as excitation sources due to the need for high-power-density energy at relatively high operating frequencies to excite plasma. The solid-state switching device used in the solid-state RF power supply has a higher switching frequency and withstand voltage value. Compared with the traditional RF power supply, it has the advantages of high efficiency, long life, and small size. It generally has a larger output capacitance, which is deduced from the circuit ...

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Problems solved by technology

However, when the load changes, the invention provides an embodiment with a manually adjusted matching network, but this embodiment cannot meet the matching requirements of ICP and other applications. At present, an automatic impedance matching device is usually used for adjustment. This method collects the load through a directional coupler. The power phase information is processed by the microcontroller, and after processing, a certain control signal is generated and sent to the stepper motor to adjust the adjustable capacitance parameters of the matching network. This method takes a long time to adjust for a wide range of non-continuously changing loads, and the matching response speed is slow. ; In addition, stepping motors and adjustable capacitors make the equipment bulky and costly

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