Polarization insensitive waveguide grating filter based on double-layer structure

A polarization-insensitive, waveguide grating technology, applied in the direction of optical waveguide light guide, light guide, optics, etc.

Active Publication Date: 2021-07-06
ZHEJIANG UNIV
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  • Polarization insensitive waveguide grating filter based on double-layer structure
  • Polarization insensitive waveguide grating filter based on double-layer structure
  • Polarization insensitive waveguide grating filter based on double-layer structure

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[0035] The present invention will be further described below in conjunction with the accompanying drawings.

[0036] The polarization-insensitive waveguide grating filter based on the double-layer structure of the present invention includes a polarization-insensitive filter unit, and the polarization-insensitive filter unit includes a silicon waveguide apodized grating layer and a silicon nitride waveguide apodized grating layer, wherein TE signals are filtered by silicon waveguide apodized gratings and TM signals are filtered by silicon nitride apodized gratings

[0037] Such as figure 1 As shown, it is the first scheme of the present invention, its polarization-insensitive filter unit adopts a multimode waveguide filter, and the described waveguide grating filter includes an input single-mode waveguide 1, a dual polarization mode (de)multiplexer 2. Input tapered waveguide 3, polarization-insensitive multimode waveguide grating filter 4, metal electrode 5, output tapered wa...

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Abstract

The invention discloses a polarization insensitive waveguide grating filter based on a double-layer structure. The filter comprises a polarization insensitive filter unit, the polarization insensitive filter unit comprises a silicon waveguide apodized grating layer and a silicon nitride waveguide apodized grating layer, the silicon waveguide apodized grating filters TE signals, and the silicon nitride waveguide apodized grating filters TM signals. The polarization insensitive filter unit can be realized by adopting a multi-mode waveguide type filter and also can be realized by adopting a grating auxiliary type filter; according to the filter, simultaneous filtering in a TE mode and a TM mode can be achieved, a grating filter insensitive to polarization is achieved, and the device size can be effectively reduced by half compared with a traditional scheme adopting a polarization rotator. In addition, based on a silicon substrate and a silicon nitride waveguide grating filter, the filter is large in tolerance and small in insertion loss, the adjustment range of the central wavelength is not limited by FSR, and filters with different bandwidths can be achieved by setting different coupling coefficients.

Description

technical field [0001] The invention belongs to the technical field of grating filters, and mainly relates to silicon and silicon nitride waveguide grating filters, in particular to a polarization-insensitive waveguide grating filter based on a double-layer structure. Background technique [0002] In recent years, with the rapid development of integrated photonics, silicon-based integrated photonic devices have become an important research direction. In the field of silicon-based integrated photonic devices, silicon-based waveguide grating devices have attracted more and more attention. A large number of achievements have been made in the research on the theory, formation mechanism, manufacturing method and application of silicon-based waveguide gratings. It has the characteristics of simple structure, easy integration, and compatible manufacturing process with existing mature CMOS processes, and has broad application fields. With the maturity of the preparation process of ...

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Application Information

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IPC IPC(8): G02B6/124G02B6/12G02F1/01
CPCG02B6/124G02B6/12004G02B6/12002G02F1/0147G02F1/011G02B2006/12109
Inventor 余辉王肖飞江晓清杨建义
Owner ZHEJIANG UNIV
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