Optical frequency converter of silicon nitride micro-ring integrated gallium selenide film
A gallium selenide and silicon nitride technology, applied in the field of nonlinear optics, can solve the problems of complex preparation process and low conversion efficiency
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[0025] Now in conjunction with embodiment, accompanying drawing, the present invention will be further described:
[0026] The implementation case of the present invention proposes a silicon nitride microring integrated gallium selenide film optical frequency converter, such as figure 1 As shown, the optical frequency converter is characterized by comprising an upper straight waveguide 1 , a micro-ring cavity 2 , a lower straight waveguide 3 and a gallium selenide thin film 4 ; the gallium selenide thin film 4 directly covers the upper surface of the micro-ring cavity 2 .
[0027] The upper straight waveguide 1, the micro-ring cavity 2, and the lower straight waveguide 3 are made of silicon nitride material with a thickness of 300 nm, and the substrate material is silicon dioxide grown on a 500 μm thick silicon substrate with a thickness of 2 μm; The width of the straight waveguide 1 and the micro-ring cavity 2 is 1100nm, the width of the lower straight waveguide is 520nm; the...
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