Anti-ablation ZrC/SiC multilayer alternate coating and preparation method thereof
An anti-ablation and coating technology, applied in coating, metal material coating process, gaseous chemical plating, etc., can solve the problems of coating failure, difficulty in resisting high scouring force, etc., to protect the substrate and realize thermal stress Matching and reducing the effect of penetrating cracks
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Embodiment 1
[0041] 1) After the processed C / C composite material is polished with 200, 400, and 800 sandpaper in sequence, it is ultrasonically cleaned in anhydrous ethanol, and then dried in an oven.
[0042] 2) Hang the C / C composite material dried in 1) vertically in a chemical vapor deposition furnace. Install the upper and lower flanges of the deposition furnace, turn on the vacuum pump, and pump the pressure in the furnace to 2000Pa. Turn on the heating switch, and raise the temperature of the deposition furnace to 1050° C. at a heating rate of 8° C. / min. During the heating process, the inert gas Ar was passed into the furnace at 400ml / min as the protective gas.
[0043] 3) After the deposition furnace finishes heating up, adjust the Ar flow rate to 500ml / min, and feed H into the furnace 2 and MTS, the flow rates are 3500ml / min and 2ml / min respectively. Adjust the suction force of the vacuum pump, control the pressure in the furnace to 5000 Pa, and deposit for 3 hours.
[0044] ...
Embodiment 2
[0050] 1) After the processed C / C composite material is polished with 200, 400, and 800 sandpaper in sequence, it is ultrasonically cleaned in anhydrous ethanol, and then dried in an oven.
[0051] 2) Hang the C / C composite material dried in 1) vertically in a chemical vapor deposition furnace. Install the upper and lower flanges of the deposition furnace, turn on the vacuum pump, and pump the pressure in the furnace to 2000Pa. Turn on the heating switch, and raise the temperature of the deposition furnace to 1250° C. at a heating rate of 10° C. / min. During the heating process, the inert gas Ar was passed into the furnace at 500ml / min as the protective gas.
[0052] 3) After the deposition furnace finishes heating up, adjust the Ar flow rate to 600ml / min, and feed H into the furnace 2 and MTS, the flow rates are 4500ml / min and 4ml / min respectively. Adjust the suction force of the vacuum pump, control the pressure in the furnace to 8000Pa, and deposit for 3.5h.
[0053] 4) ...
Embodiment 3
[0059] 1) After the processed C / C composite material is polished with 200, 400, and 800 sandpaper in sequence, it is ultrasonically cleaned in anhydrous ethanol, and then dried in an oven.
[0060] 2) Hang the C / C composite material dried in 1) vertically in a chemical vapor deposition furnace. Install the upper and lower flanges of the deposition furnace, turn on the vacuum pump, and pump the pressure in the furnace to 2000Pa. Turn on the heating switch, and raise the temperature of the deposition furnace to 1350° C. at a heating rate of 12° C. / min. During the heating process, the inert gas Ar was passed into the furnace at 600ml / min as the protective gas.
[0061] 3) After the deposition furnace finishes heating up, adjust the Ar flow rate to 800ml / min, and feed H into the furnace 2 and MTS, the flow rates are 5000ml / min and 5ml / min respectively. Adjust the suction force of the vacuum pump, control the pressure in the furnace to 10000 Pa, and deposit for 4 hours.
[0062...
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