Convenient-to-center cluster beam filter and application thereof

Abstract

The invention discloses a convenient-to-center cluster beam filter and application thereof. The cluster beam filter comprises a main body component and a centering auxiliary component. The main body component comprises an annular base, a fixing ring and a filtering cone. An outer step ring is arranged on the outer side of one end of the annular base, an inner step ring is arranged on the inner side of the fixing ring, the annular base is sleeved with the fixing ring, the fixing ring is connected with an installation plane through a first connecting piece, the annular base is in clearance fit with the inner wall of the fixing ring, and the top face of the outer step ring is attached to the top face of the inner step ring. The filtering cone is detachably connected with the annular base. The centering auxiliary component comprises a centering auxiliary ring and a centering auxiliary rod which is matched with the inner diameter of the centering auxiliary ring and is arranged in the centering auxiliary ring in a sleeved manner. The centering auxiliary ring is detachably connected with the annular base. According to the invention, the filtering cone is mounted on the position-adjustable base to realize a position adjusting function, and the filter is centered on the axis of a cluster beam through the auxiliary centering device, so that the purpose of depositing a high-quality cluster assembly film material is achieved.

Description

technical field [0001] The invention relates to the field of cluster beam deposition devices, in particular to a cluster beam filter convenient for centering and its application. Background technique [0002] Cluster beam deposition technology is an advanced method for the fine preparation of nanostructure and functional thin films developed in recent decades. It is a simple, efficient, fast and low-cost technology. At the same time, the formed nanostructure has significant advantages such as high purity and stability, and has attracted widespread attention from academia and industry. The main process of preparing nanomaterials by the cluster beam deposition system includes: (1) in the condensation chamber, high-density target atomic gas is generated by means of sputtering, laser ablation, arc discharge or thermal evaporation; (2) target In the condensation chamber, the atomic gas collides with the buffer gas to release energy, nucleates and grows into cluster particles; (3...

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Problems solved by technology

[0004] The purpose of the present invention is to overcome the unavoidable errors in the processing and assembly process of the existing cluster beam equipment, resulting in that the hole centers of the filters and nozzles are often not on a straight line, and the imperfect centering often affects the cluster flow. The intensity and particle size distribution of the cluster beam further restrict the quality of the cluster deposited film, provide a cluster beam filter and its application that is convenient for centering, and install the filter cone on a position-adjustable base Come up to realize the position adjustment function, and through the auxiliary centering device, the filter is centered on the axis of the cluster beam, so as to achieve the purpose of depositing high-quality cluster assembly film materials

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