A cluster beam filter for easy centering and its application

Abstract

The invention discloses a cluster beam filter which is convenient for centering and its application. It comprises a main component and an auxiliary centering component. The main component includes an annular base, a fixing ring and a filter cone; , the inner side of the fixing ring is provided with an inner step ring, the fixing ring is sleeved outside the annular base, and is connected with the installation plane through the first connecting piece, the annular base and the inner wall of the fixing ring are gap-fitted, and the top surface of the outer step ring and the inner step The top surface of the ring fits together; the filter cone is detachably connected to the annular base; the centering auxiliary member includes a centering auxiliary ring and a centering auxiliary rod that matches the inner diameter of the centering auxiliary ring and is sleeved in the centering auxiliary ring; The middle auxiliary ring is detachably connected with the ring base. In the invention, the filter cone is installed on a position-adjustable base to realize the function of position adjustment, and the filter is centered on the cluster beam axis through the auxiliary centering device, so as to achieve the purpose of depositing high-quality cluster assembly film materials.

Description

technical field [0001] The invention relates to the field of cluster beam deposition devices, in particular to a cluster beam filter which is convenient for centering and its application. Background technique [0002] Cluster beam deposition technology is an advanced method for the fine preparation of nanostructured and functional thin films developed in recent decades. It is a simple, efficient, fast and low-cost technology. At the same time, the formed nanostructures have remarkable advantages such as high purity and stability, and have received extensive attention from academia and industry. The main process of preparing nanomaterials by the cluster beam deposition system includes: (1) In the condensation chamber, high-density target atomic gas is generated by means of sputtering, laser ablation, arc discharge or thermal evaporation; (2) The target material In the condensation chamber, the atomic gas collides with the buffer gas to release energy, nucleates and grows int...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to overcome the unavoidable errors in the processing and assembly process of the existing cluster beam equipment, resulting in that the hole centers of the filters and nozzles are often not on a straight line, and the imperfect centering often affects the cluster flow. The intensity and particle size distribution of the cluster beam further restrict the quality of the cluster deposited film, provide a cluster beam filter and its application that is convenient for centering, and install the filter cone on a position-adjustable base Come up to realize the position adjustment function, and through the auxiliary centering device, the filter is centered on the axis of the cluster beam, so as to achieve the purpose of depositing high-quality cluster assembly film materials

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