Gauge block measuring device and method based on white light interference
A measuring device, the technology of white light interference, which is applied in the direction of measuring device, mechanical measuring device, optical device, etc., can solve the problems of unreliable contact of main bars, being susceptible to external interference, increasing system error, etc., to improve stability and anti-interference. Ability, convenient and fast operation, the effect of eliminating vibration error
Active Publication Date: 2021-08-13
东北大学秦皇岛分校 +1
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Problems solved by technology
On the other hand, when using single-ended measurement, although the structure is relatively simple, it is affected by the auxiliary flat crystal grinding; while when using double-ended measurement, although there is no effect of auxiliary flat crystal grinding, it needs to measure multiple distances, increasing systematic error
[0003] Chinese patent CN110595351B discloses a method for measuring the value of a white light interferometer with an etalon. The measurement block is placed on the steel flat crystal, and the measurement accuracy is affected by the grinding of the steel flat crystal and the gauge block. At the same time, this contact The measurement is also easy to pollute and damage the surface of the gauge block; moreover, the sample light and reference light are in a non-common optical path, so they are easily affected by external interference, including air flow, temperature changes, and steel flat crystal vibrations
Chinese patent CN201306998Y discloses a kind of laser interferometer with equal gauge block contact type. When measuring, the measuring head is in contact with the upper surface of the gauge block, and the lower surface of the gauge block is in contact with the workbench for measurement. The main problems of this measurement method are: Does not comply with international standards; requires special processing of the rib-shaped workbench; deformation of the gauge block may cause the main rib in the middle of the gauge block and the workbench to not be in reliable contact, causing measurement errors
Method used
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Embodiment 1
[0068] according to figure 1 The described gauge block measurement device based on white light interference includes a low-coherence light source 1, a spectroscopic element 2, a gauge block 6, a spectrometer 3, a first transparent plate 5, a second transparent plate 9, a first lens assembly 4, and a second transparent plate 9. Two lens assemblies 8, wherein figure 1 The shown spectroscopic element 2 is a 2*2 coupler, the first lens assembly 4 is provided with two first lenses, the second lens assembly 8 is provided with two second lenses, and the low-coherence light source 1 emits Light enters the coupler through an optical fiber, and the light output from one end of the coupler passes through a first lens in the first lens assembly 4 far away from the first transparent plate 5 to become a parallel beam, and the parallel beam passes through a lens close to the first transparent plate 5 The first lens converges on the left surface of the gauge block 6; the light output from th...
Embodiment 2
[0112] according to Figure 6 The above-mentioned gauge block measurement device based on white light interference is different from Embodiment 1 in that the first lens assembly includes a first lens, the second lens assembly includes a second lens, and the rest of the settings are the same , and the principle of the applied method is also the same as that in Example 1.
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The invention discloses a gauge block measuring device and method based on white light interference, and relates to the technical field of measurement, the gauge block measuring device comprises a low-coherence light source, a light splitting element, a gauge block, a spectrograph, a first transparent plate and a second transparent plate, the light emitted by the low-coherence light source enters the light splitting element, the light outputted from one end of the light splitting element is converged on the left surface of the gauge block through the first lens assembly; the light outputted from the other end of the light splitting element is converged on the right surface of the gauge block through the second lens assembly; light reflected by the gauge block and the first transparent plate enters the spectrometer through the light splitting element to form a first interference spectrum; light reflected by the gauge block and the second transparent plate returns to the light splitting element and enters the spectrograph to form a second interference spectrum; and the spectrograph records a superposed signal of the two interference spectrums and then transmits the superposed signal to the data processing module for processing. By combining the frequency and phase of Fourier transform, high-precision measurement of the gauge block based on white light interference is realized, contact is not needed, and the operation is convenient.
Description
technical field [0001] The invention relates to the technical field of gauge block measurement, in particular to a gauge block measurement device and method based on white light interference. Background technique [0002] Gauge block is an internationally accepted and most important physical transmission standard of length value. It is one of the most widely used measuring instruments in the field of measurement technology and engineering measurement. It transmits length units to all links of industrial production. play an important role in the guarantee system. As a measuring instrument, it is very necessary for the gauge block to be accurate and correct. Therefore, the verification of the gauge block is an indispensable step to ensure the normal use of the gauge block. Optical interference technology is currently the most important high-precision gauge block measurement method. . Although optical interferometry has the advantage of high resolution in theory, because inte...
Claims
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Patent Timeline
Login to View More IPC IPC(8): G01B5/02G01B9/02
CPCG01B5/02G01B9/0209G01B9/02084G01B9/02071G01B9/02077
Inventor 王毅姜云飞马振鹤彭思龙汪雪林顾庆毅赵效楠王一洁郭晓锋
Owner 东北大学秦皇岛分校