Hybrid integrated optical accelerometer based on Michelson interference

An accelerometer, hybrid integration technology, applied in the direction of measurement of acceleration, speed/acceleration/shock measurement, measurement device, etc., can solve problems such as unfavorable small integration and commercialization of accelerometers, and achieve environmental adaptability and reliability against electromagnetic interference. High performance and small relative position error

Active Publication Date: 2021-08-17
ZHEJIANG UNIV
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Problems solved by technology

Wavelength-sensitive accelerometers need to use high-precision spectrometers to detect changes in light wavelengths, which is not conducive to the small integration and commercialization of accelerometers, and is still in the laboratory research stage

Method used

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  • Hybrid integrated optical accelerometer based on Michelson interference
  • Hybrid integrated optical accelerometer based on Michelson interference
  • Hybrid integrated optical accelerometer based on Michelson interference

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Embodiment Construction

[0040] The present invention will be further described below in conjunction with drawings and embodiments.

[0041] Such as Figure 1-5 As shown, the present invention includes a narrow linewidth laser light source 1, a mode speckle converter 2, an input waveguide 3, a first transverse strip groove 4, a first ball lens 5, a power recirculation mirror 6, and a second ball lens 7,2 : 1 type Y waveguide 8, 1:2 type Y waveguide 9, second transverse strip groove 10, third ball lens 11, first F-P cavity input mirror 12, fourth ball lens 13, first upper electrode 14, second Lower electrode 15, first curved waveguide 16, longitudinal strip groove 17, fifth ball lens 18, spring vibrator structure 22, sixth ball lens 23, second curved waveguide 24, second upper electrode 25, second lower electrode 26. The third transverse strip groove 27, the seventh ball lens 28, the second F-P cavity input mirror 29, the eighth ball lens 30, the photodetector 31, the lithium niobate single crystal th...

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Abstract

The invention discloses a hybrid integrated optical accelerometer based on Michelson interference. Light of a narrow linewidth light source passes through a spot size converter and then is coupled to enter an input waveguide, light splitting is achieved on a 2:1 type Y waveguide along a first transverse strip-shaped groove; a first light beam firstly passes through a third spherical lens, a first F-P cavity input mirror and a fourth spherical lens along a second transverse strip-shaped groove, then enters a first bent waveguide, passes through a fifth spherical lens along a longitudinal strip groove, is reflected on the rear surface of a mass block of a spring oscillator structure and is returned according to the original path; and a second light beam firstly enters a second bent waveguide along a third transverse strip-shaped groove, passes through a sixth spherical lens along the longitudinal strip-shaped groove, is reflected on the front surface of the mass block of the spring oscillator structure and is returned according to the original path; and the two beams of light are coupled into a 1:2 type Y waveguide branch and then directly coupled into a photoelectric detector. The hybrid integrated optical accelerometer is high in detection sensitivity, compact in structure, high in integration level, simple in preparation process, high in reliability and resistant to electromagnetic interference and has certain environmental adaptability.

Description

technical field [0001] The invention belongs to an optical accelerometer in the technical field of integrated optics and inertial sensing, in particular to a hybrid integrated optical accelerometer based on Michelson interference. Background technique [0002] In recent years, with the increasing maturity of microelectronics technology, integrated circuit technology and micromachining technology, MEMS accelerometers have received widespread attention due to their advantages of small size, light weight, low power consumption, high reliability, high sensitivity and easy integration. And it has developed rapidly, and has gradually replaced traditional mechanical sensors as the main force in miniature sensors. Limited by its resolution and dynamic range bottlenecks, MEMS accelerometers cannot be used in the field of high-precision inertial navigation and guidance. Under the urgent vision of developing new accelerometers, MOEMS accelerometers were born. [0003] MOEMS accelerome...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/093
CPCG01P15/093
Inventor 佘玄孙培基姚俊杰陈侃毕然黄腾超舒晓武
Owner ZHEJIANG UNIV
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