Hybrid integrated optical accelerometer based on Michelson interference

Abstract

The invention discloses a hybrid integrated optical accelerometer based on Michelson interference. Light of a narrow linewidth light source passes through a spot size converter and then is coupled to enter an input waveguide, light splitting is achieved on a 2:1 type Y waveguide along a first transverse strip-shaped groove; a first light beam firstly passes through a third spherical lens, a first F-P cavity input mirror and a fourth spherical lens along a second transverse strip-shaped groove, then enters a first bent waveguide, passes through a fifth spherical lens along a longitudinal strip groove, is reflected on the rear surface of a mass block of a spring oscillator structure and is returned according to the original path; and a second light beam firstly enters a second bent waveguide along a third transverse strip-shaped groove, passes through a sixth spherical lens along the longitudinal strip-shaped groove, is reflected on the front surface of the mass block of the spring oscillator structure and is returned according to the original path; and the two beams of light are coupled into a 1:2 type Y waveguide branch and then directly coupled into a photoelectric detector. The hybrid integrated optical accelerometer is high in detection sensitivity, compact in structure, high in integration level, simple in preparation process, high in reliability and resistant to electromagnetic interference and has certain environmental adaptability.

Description

technical field [0001] The invention belongs to an optical accelerometer in the technical field of integrated optics and inertial sensing, in particular to a hybrid integrated optical accelerometer based on Michelson interference. Background technique [0002] In recent years, with the increasing maturity of microelectronics technology, integrated circuit technology and micromachining technology, MEMS accelerometers have received widespread attention due to their advantages of small size, light weight, low power consumption, high reliability, high sensitivity and easy integration. And it has developed rapidly, and has gradually replaced traditional mechanical sensors as the main force in miniature sensors. Limited by its resolution and dynamic range bottlenecks, MEMS accelerometers cannot be used in the field of high-precision inertial navigation and guidance. Under the urgent vision of developing new accelerometers, MOEMS accelerometers were born. [0003] MOEMS accelerome...

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Problems solved by technology

Wavelength-sensitive accelerometers need to use high-precision spectrometers to detect changes in light wavelengths, which is not conducive to the small integration and commercialization of accelerometers, and is still in the laboratory research stage

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