A kind of electronic grade sulfuric acid preparation device and its preparation method

A preparation device and electronic-grade technology, which are applied to electronic-grade sulfuric acid preparation devices and their preparation fields, can solve the problems of poor waste gas and acid mist treatment effect and low efficiency, and achieve the effects of improving purification effect, fast efficiency and cost saving.

Active Publication Date: 2021-10-22
LIANSHI NEW MATERIAL CORP LTD
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  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

[0004] The object of the present invention is to provide an electronic-grade sulfuric acid preparation device with good effect and high efficiency on waste gas and acid mist treatment and its preparation method for the above-mentioned problems of poor effect and low efficiency on waste gas and acid mist treatment

Method used

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  • A kind of electronic grade sulfuric acid preparation device and its preparation method
  • A kind of electronic grade sulfuric acid preparation device and its preparation method
  • A kind of electronic grade sulfuric acid preparation device and its preparation method

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Effect test

Embodiment

[0040] Electronic grade sulfuric acid preparation device, such as Figure 1-8 As shown, including:

[0041] The pretreatment pool 7, the pretreatment pool is contained in the pretreatment, the strong oxidizing agent comprises potassium permanganate and potassium having a red chromate for reductive impurities in the oxidation of sulfuric acid.

[0042] The rectification column 8, the rectification tower interior temperature is 185-195 ° C, the pressure is 1.45-2.23 kPa, and the sulfate impurities generated by oxidation in the pretreatment cell, resulting in high purity sulfuric acid;

[0043] The absorption tower 9 is provided with an alkaline solution in the absorbing treatment tower for absorbing an acidic exhaust gas produced in the distillation column;

[0044] Filter 10, the filter is provided with a microporous filter membrane, which can be filled with fine solid particles in high purity sulfuric acid.

[0045] Further, the absorption treatment tower 9 includes a cylindrical h...

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Abstract

The invention belongs to the field of chemical product preparation, and in particular relates to an electronic-grade sulfuric acid preparation device and a preparation method thereof. The device includes a pretreatment tank, which is filled with strong oxidants, including potassium permanganate and potassium dichromate, which are used to oxidize reducing impurities in industrial sulfuric acid raw materials; the internal temperature of the rectification tower is 185‑195 °C , the pressure is 1.45-2.23kPa, used to remove the sulfate impurities generated by the oxidation reaction in the pretreatment tank to obtain high-purity sulfuric acid; the absorption treatment tower, the absorption treatment tower is equipped with an alkaline solution, used for absorption and rectification tower The acid waste gas produced in the environment; the filter is equipped with a microporous membrane, which can filter out the fine solid particle impurities in the high-purity sulfuric acid. The invention has low cost, good impurity removal and purification efficiency, effectively and efficiently purifies and absorbs the acid mist waste gas generated in the preparation process, reduces environmental pollution, and improves production efficiency.

Description

Technical field [0001] The present invention belongs to the field of chemical product preparation, and more particularly to an electron-level sulfuric acid preparation device and a preparation method thereof. Background technique [0002] Electronic grade sulfuric acid is an ultra-net high purification agent that plays a crucial role in the development of microelectronics technology, widely used in the assembly and processing of semiconductors, large scale integrated circuits, mainly used for cleaning of silicon wafers and Erochor, the impurity particles, inorganic residues and carbon precipitate on the wafer can be removed. [0003] In the prior art, during the preparation of electronic grade sulfuric acid, a large amount of exhaust gas, acid mist, is not conducive to environmental protection, and most of the existing electronic sulfuric acid preparation devices do not have exhaust gas, acid fog A absorption processing equipment, or only the alkali solution tank is provided, and...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B01D1/06B01D1/02B01D1/30B01D1/00B01D3/10B01D53/14B01D53/18C01B17/90C01B17/80C01B17/765
CPCB01D1/0041B01D1/02B01D1/06B01D1/30B01D3/10B01D53/1481B01D53/18B01D2252/10C01B17/765C01B17/806C01B17/90
Inventor 李俊霖秦龙飞
Owner LIANSHI NEW MATERIAL CORP LTD
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