Electronic-grade sulfuric acid preparation device and preparation method thereof

A preparation device and electronic-grade technology, applied in electronic-grade sulfuric acid preparation device and its preparation field, can solve the problems of poor treatment effect and low efficiency of waste gas and acid mist

Active Publication Date: 2021-08-20
LIANSHI NEW MATERIAL CORP LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The object of the present invention is to provide an electronic-grade sulfuric acid preparation device with good effect and high efficiency on waste gas and acid mist treatment and its preparation method for the above-mentioned problems of poor effect and low efficiency on waste gas and acid mist treatment

Method used

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  • Electronic-grade sulfuric acid preparation device and preparation method thereof
  • Electronic-grade sulfuric acid preparation device and preparation method thereof
  • Electronic-grade sulfuric acid preparation device and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment

[0040] Electronic grade sulfuric acid preparation device, such as Figure 1-8 As shown, including:

[0041] The pretreatment pool 7, the pretreatment pool is contained in the pretreatment cell, the strong oxidant comprising potassium permanganate and potassium having a red chromate for reducing impurities in the raw material of oxidation;

[0042] The rectification column 8, the rectification tower interior temperature is 185-195 ° C, the pressure is 1.45-2.23 kPa, and the sulfate impurities produced by oxidation in the pretreatment cell, resulting in high purity sulfuric acid;

[0043] The absorption treatment tower 9 is provided with an alkaline solution in the absorbing treatment tower for absorbing the acidic exhaust gas generated in the distillation column;

[0044] Filter 10, the filter is provided with a microporous filter film, which can remove fine solid particulate impurities in high purity sulfuric acid.

[0045] Further, the absorption treatment tower 9 includes a cylin...

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PUM

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Abstract

The invention belongs to the field of chemical product preparation, and particularly relates to an electronic-grade sulfuric acid preparation device and a preparation method thereof. The device comprises a pretreatment tank, the pretreatment tank is filled with a strong oxidant, and the strong oxidant comprises potassium permanganate and potassium dichromate and is used for oxidizing reducing impurities in industrial sulfuric acid raw materials; the internal temperature of a rectifying tower is 185-195 DEG C, the pressure is 1.45-2.23 kPa, and the rectifying tower is used for removing sulfate impurities generated by the oxidation reaction in the pretreatment tank to obtain high-purity sulfuric acid; an alkaline solution is arranged in an absorption treatment tower and is used for absorbing and neutralizing the acid waste gas generated in the rectifying tower; and a microporous filter membrane is arranged in a filter, so that fine solid particle impurities in the high-purity sulfuric acid can be filtered out. The preparation device is low in cost and good in impurity removal and purification efficiency, acid mist waste gas generated in the preparation process is effectively and efficiently purified and absorbed, pollution to the environment is reduced, and the production efficiency is improved.

Description

Technical field [0001] The present invention belongs to the field of chemical product preparation, and more particularly to an electron-level sulfuric acid preparation device and a preparation method thereof. Background technique [0002] Electronic grade sulfuric acid is an ultra-clean high purification agent that plays a crucial role in the development of microelectronics technology, widely used in the assembly and processing of semiconductors, large scale integrated circuits, mainly for cleaning of silicon wafers and Erosion, the impurity particles, inorganic residues and carbon precipitate on the wafer can be removed. [0003] In the prior art, in the preparation of electronic grade sulfuric acid, a large amount of exhaust gas, acid mist, is not conducive to environmental protection, and most of the existing electronic sulfuric acid preparation devices do not have exhaust gas, acid fog Absorbing the processing equipment, or only the alkali solution tank is provided, and the e...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01D1/06B01D1/02B01D1/30B01D1/00B01D3/10B01D53/14B01D53/18C01B17/90C01B17/80C01B17/765
CPCB01D1/0041B01D1/02B01D1/06B01D1/30B01D3/10B01D53/1481B01D53/18B01D2252/10C01B17/765C01B17/806C01B17/90
Inventor 李俊霖秦龙飞
Owner LIANSHI NEW MATERIAL CORP LTD
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