Method and device for recovering and purifying argon tail gas

Abstract

The invention relates to a method and a device for recovering and purifying argon tail gas. The recovery and purification method of the argon tail gas comprises the following steps: pretreating the argon tail gas to obtain pretreated gas, adsorbing and removing H2O and CO2 in the pretreated gas to obtain purified gas, rectifying and removing N2 and CO in the purified gas to obtain rectified gas, catalyzing and adsorbing and removing O2 in the rectified gas to obtain deoxidized gas, and adsorbing and removing H2O in the deoxidized gas to obtain argon for the electronic industry. The recovery and purification device for the argon tail gas comprises a pretreatment system for pretreating the argon tail gas, a purification system for adsorbing and removing H2O and CO2, a rectification system for rectifying and removing N2 and CO, a deoxidation system for catalyzing and adsorbing and removing O2 and a dehydration system for adsorbing and removing H2O which are connected in sequence. The argon in the argon tail gas can be simply and safely recovered and purified and made into the argon for the electronic industry, the cost is saved, the economic benefit is improved, and the environmental pollution is reduced.

Description

Technical field [0001] The present invention relates to the technical field of industrial exhaust gas treatment, and more particularly to the recovery method and apparatus for argon tail gas. Background technique [0002] The industry currently uses more and more industries, and at the same time, as people improve product quality requirements, the requirements for argon purity are getting higher and higher. For example, argon (argon gas in electronics) used in the electronics industry, and its argon purity volume fraction requires 99.9999%. [0003] The industrial argon tail gas (even if the exhaust gas discharged with argon) is composed of argon and other various impurity components, and the argon exhaust gas is recovered, and various impurity components are sequentially removed in a particular order. For oxygen such impurity components, the commonly used removal protocol is: in order to completely remove oxygen, excess hydrogen is usually added to form water. Since the scheme i...

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Problems solved by technology

Due to the excessive amount of hydrogen in the removal of oxygen in this scheme, it is necessary to remove hydrogen later (for example, hydrogen can be removed by low temperature method), if the hydrogen is not removed, the purity of the final argon gas will be affected

When the argon tail gas contains a large amount of oxygen, a small amount of carbon monoxide, carbon dioxide, nitrogen and water, if the above-mentioned solution for removing oxygen is adopted, it is necessary to configure equipment capable of providing a large amount of hydrogen (such as hydrogen production equipment), which makes the overall solution more complicated. Higher cost and reduced security

Therefore, it is difficult to recycle the argon tail gas containing a large amount of oxygen, and sometimes it is even directly discharged into the atmosphere, which not only pollutes the environment, but also causes a lot of waste

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