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A Calibration Method of System Parameters of Double Rotating Compensator Muller Matrix Ellipsometer

A technology of double rotary compensator and rotary compensator, which is applied in the direction of instruments, scientific instruments, complex mathematical operations, etc., can solve the problem that the initial value deviation calibration result cannot be solved, and achieve stable calculation results, good robustness, and avoid system effect of error

Active Publication Date: 2022-05-20
HUAZHONG UNIV OF SCI & TECH
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  • Application Information

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Problems solved by technology

When using the LM algorithm for fitting, the fitting result is affected by the initial value of the fitting. If the initial value deviation is too large, the calibration result may not be solved.
The eigenvalue calibration method can only be applied to discrete measurement processes, such as four liquid crystal Muller matrix measurement systems

Method used

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  • A Calibration Method of System Parameters of Double Rotating Compensator Muller Matrix Ellipsometer
  • A Calibration Method of System Parameters of Double Rotating Compensator Muller Matrix Ellipsometer
  • A Calibration Method of System Parameters of Double Rotating Compensator Muller Matrix Ellipsometer

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Embodiment 1

[0037] In an embodiment of the present invention, the calibration sample includes a polarizer with an azimuth angle of 0°, a polarizer with an azimuth angle of about 90°, and a quarter-wave plate with an azimuth angle of about 30°. The test method is as follows: image 3 Shown:

[0038] Step 1, place the above-mentioned three calibration samples on the first calibration plane 105 in turn, align the light path, and complete the data collection of light intensity information, and the result is denoted as I f i (t), where i=1, 2, 3, corresponding to different calibration samples in turn, can collect signals of multiple periods, and then take the average to reduce the influence of random errors in the system on the measurement results.

[0039] Step 2, place the above-mentioned three calibration samples on the second calibration plane 107 in turn, align the light path, and complete the data collection of light intensity information, and the result is denoted as I b i (t), where...

Embodiment 2

[0108] One embodiment of the present invention is aimed at 5:3 double rotation compensator type Muller matrix ellipsometer, implements the specific calibration method process as follows:

[0109] Step 100, according to the formula (7.1) (7.2) (7.3) (7.4) (8) and (9), after obtaining the sampling signal, perform Fourier analysis to obtain the Fourier coefficient, select the corresponding basis vector value and Solve the light intensity matrix D in the form of 5×5.

[0110]

[0111] S W (t)=[1cos10ωt sin10ωt cos20ωt sin20ωt] T (20.2)

[0112] S A (t)=[1cos6ωt sin6ωt cos12ωt sin12ωt] (20.3)

[0113]

[0114] where α i , β j are the Fourier coefficients of the sampled signal.

[0115] Step 200, after obtaining the light intensity matrix corresponding to each group of sampling signals, analyze the eigenvalues ​​of the Mueller matrix of the calibration sample according to the formula (11.1) (11.2), and deduce the calibration sample in the form of the Mueller matrix of ...

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Abstract

The invention discloses a method for calibrating system parameters of a double-rotating compensator-type Mueller matrix ellipsometer, which belongs to the field of precision optical measuring instrument system calibration. The method includes placing a plurality of calibration samples on the first rotating compensator and The calibration plane between the second rotating compensators collects the light intensity information of multiple calibration samples; performs Fourier analysis on the light intensity information to obtain the Fourier coefficient of the light intensity information, and combines the Fourier The leaf coefficient establishes the matrix form function of the light intensity information; uses the eigenvalue calibration method to solve the matrix form function of the light intensity information, and obtains the modulation matrix of the polarizer arm and the analysis matrix of the polarizer arm after calibration, thereby completing the system parameters calibration. The method for calibrating the system parameters of the double-rotating compensator-type Mueller matrix ellipsometer proposed by the present invention does not need to model the system, can avoid system errors introduced by modeling deviations, greatly reduces the difficulty of system calibration and greatly improves the Calibration accuracy of the system.

Description

technical field [0001] The invention belongs to the field of system parameter calibration of precision optical measuring instruments, and more specifically relates to a method for calibrating system parameters of a double-rotating compensator type Mueller matrix ellipsometer. Background technique [0002] Compared with the traditional ellipsometer, which can only measure the amplitude ratio angle and phase difference angle of the sample, the double-rotating compensator Mueller matrix ellipsometer can measure the full Mueller matrix information of the sample, and can characterize the sample anisotropy and degradation. Partial and other more complex optical properties. This type of ellipsometer can obtain the Mueller matrix of the sample under the corresponding wavelength and incident angle by controlling the two compensators to rotate synchronously at a certain speed ratio. It has the advantages of simple modulation, high measurement accuracy, wide spectral coverage and syste...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/21G06F17/14G06F17/16
CPCG01N21/211G06F17/141G06F17/16G01N2201/12746
Inventor 陈修国盛胜庄锦峰刘世元
Owner HUAZHONG UNIV OF SCI & TECH
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