Steady flow area laser/ultrasonic composite low-damage complex microstructure machining device and method
A processing device and low-damage technology, which is applied in the field of laser/ultrasonic composite low-damage complex microstructure processing devices in the steady flow region, can solve the problems of difficulty in meeting the requirements of micro-processing, pollution, etc., and achieves the improvement of processed surface quality and subsurface. performance, improved execution accuracy, the effect of reduced disturbances
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[0029] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.
[0030] Such as figure 1As shown, the laser / ultrasonic composite low-damage complex microstructure processing device in the steady flow area includes: a base 2, a workpiece clamping slide unit 4, a laser unit 5, a jet gun unit and a host computer; the workpiece clamping slide The table unit 5, the laser unit 5 and the jet gun unit are all arranged on the base 2; below the workpiece clamping slide unit 5, a waste liquid tank 9 is arranged on the base 2; wherein the workpiece 15 is clamped On the workpiece clamping slide unit 5; in this embodiment, the material of the workpiece 15 is weak rigidity material. The optical axis of the laser light emitted by the laser unit 5 is in a horizontal state, perpendicular to the surface of the workpiece 15, and after the laser 23 finishes focusing during the processing, the light reflected by the mirror is i...
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