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Method for preparing metal support monomer by adopting magnetron sputtering method

A metal support, magnetron sputtering technology, applied in sputtering plating, metal material coating process, ion implantation plating, etc., can solve the problem of high resistance, high working temperature, inability to apply MS-SOC, and low electrocatalytic activity and other problems, to achieve the effect of small resistance, improved electrocatalytic activity and volume power density

Inactive Publication Date: 2021-09-07
北京思伟特新能源科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The present invention provides a kind of method that adopts magnetron sputtering method to prepare metal support monomer, to solve the SOFC and SOEC film prepared by the method that the above-mentioned related art provides is thicker, and resistance is bigger, causes electrocatalytic activity to be low, volumetric power density Low, and high operating temperature can not be applied to the technical problems of MS-SOC

Method used

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  • Method for preparing metal support monomer by adopting magnetron sputtering method
  • Method for preparing metal support monomer by adopting magnetron sputtering method
  • Method for preparing metal support monomer by adopting magnetron sputtering method

Examples

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Embodiment 1

[0086] To prepare the fuel electrode layer, sputter Ni metal and yttrium-stabilized zirconia as target materials of the fuel electrode layer onto the porous metal support provided in the embodiment of the present invention. Ni metal and yttrium stabilized zirconia (YSZ) dense ceramic material are used as targets, Ni metal adopts direct current (DC) sputtering mode, YSZ adopts radio frequency (RF) sputtering mode, control DC sputtering power DC to 30W, RF sputtering The radiation power is 100W, and the gas is O 2 Mixed gas with Ar, the gas ratio is 1 / 5, the gas flow rate is 10sccm, the pressure in the sputtering chamber is 1Pa, the temperature of the metal support substrate is 300°C, the rotation speed of the metal support substrate is 12rpm, the metal support substrate and the fuel electrode layer The distance between the targets is 2 cm, the sputtering time is 100 min, and the thickness of the obtained fuel electrode layer is 20 nm.

[0087] The electrolyte layer was prepare...

Embodiment 2

[0091] To prepare the fuel electrode layer, sputter Ni metal and yttrium pick alloy as target materials of the fuel electrode layer onto the porous metal support provided in the embodiment of the present invention. Using Ni metal and yttrium pick alloy as the target material, Ni metal and yttrium pick alloy adopt direct current (DC) sputtering mode, control the DC sputtering power DC to 50W, and use O as the gas 2 Mixed gas with Ar, O 2 The ratio of the gas to Ar is 1 / 5, the gas flow rate is 100 sccm, the pressure in the sputtering chamber is 1Pa, the temperature of the metal support substrate is 300°C, the rotation speed of the metal support substrate is 12rpm, and the distance between the metal support substrate and the fuel electrode layer target 6cm, the sputtering time is 60min, and the thickness of the obtained fuel electrode layer is 80nm.

[0092] Prepare the electrolyte layer, use yttrium pick alloy as the target material, adopt DC sputtering mode, DC sputtering powe...

Embodiment 3

[0096] To prepare the fuel electrode layer, sputter Ni metal and yttrium-stabilized zirconia as target materials of the fuel electrode layer onto the porous metal support provided in the embodiment of the present invention. Ni metal and yttrium stabilized zirconia (YSZ) dense ceramic material are used as targets, Ni metal adopts direct current (DC) sputtering mode, YSZ adopts radio frequency (RF) sputtering mode, control DC sputtering power to 200W DC, RF sputtering The radiation power is 300W, and the gas is O 2 Mixed gas with Ar, O 2 The ratio of the gas to Ar is 1 / 5, the gas flow rate is 120 sccm, the pressure in the sputtering chamber is 10Pa, the temperature of the metal support substrate is 600°C, the rotation speed of the metal support substrate is 20rpm, and the distance between the metal support substrate and the fuel electrode layer target 15cm, the sputtering time is 20h, and the thickness of the obtained fuel electrode layer is 5μm.

[0097] The electrolyte layer...

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Abstract

The invention provides a method for preparing a metal support monomer by adopting a magnetron sputtering method. The method for preparing the metal support monomer by adopting the magnetron sputtering method comprises the following steps: a fuel electrode layer is prepared, and Ni metal and yttrium-stabilized zirconium oxide, or Ni metal and yttrium-pickaxe alloy fuel electrode layer target material are co-sputtered onto a metal support body, wherein the metal support body is provided with a porous area, and a protective coating arranged along the outer surface of the metal supporting body and the porous inner wall of the porous area, and a fuel electrode layer target material covers the porous area; an electrolyte layer is prepared, yttrium-stabilized zirconium oxide or scandium-stabilized zirconium oxide, or yttrium metal, or pickaxe metal, or yttrium-pickaxe alloy electrolyte layer target material is subjected to single sputtering or co-sputtering onto the fuel electrode layer; an air electrode layer is prepared, yttrium-stabilized zirconium oxide and La1-xSrxMnO3, or yttrium-pickaxe alloy and La1-xSrxMnO3 air electrode layer target material are co-sputtered onto the electrolyte layer to obtain the metal support monomer. According to the invention, the electrocatalytic activity and the volume power density of a metal support monomer battery are improved.

Description

technical field [0001] The invention belongs to the technical field of batteries, and in particular relates to a method for preparing a metal support monomer by using a magnetron sputtering method. Background technique [0002] With the depletion of fossil fuels and the aggravation of environmental pollution, people urgently need to develop environmentally friendly renewable energy. Hydrogen energy, as a clean, efficient and environmentally friendly renewable energy, has attracted widespread attention. Both Solid Oxide Fuel Cell (SOFC) and Solid Oxide Electrolyse Cells (SOEC) are clean, efficient, and safe. Metal supported-Solid Oxide Cells (MS-SOC for short), due to its simple packaging, low cost and relatively low operating temperature (500-650°C), has become the third-generation solid oxide cell that has attracted worldwide attention. Battery. [0003] The related technology adopts magnetron sputtering method to prepare SOFC and SOEC. The working principle of magnetron...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/06H01M4/88H01M8/1213H01M8/1286
CPCC23C14/352C23C14/0688H01M8/1286H01M8/1213H01M4/8871H01M2008/1293Y02E60/50
Inventor 刘亚迪胡浩然
Owner 北京思伟特新能源科技有限公司