Etching-free metasurface doped based on space rule and compatible with traditional optical thin film

Abstract

The invention discloses an etching-free metasurface doped based on a space rule and compatible with a traditional optical thin film. The doped metasurface is formed by arranging units in a plurality of doped areas. The dielectric function of a doped region unit is changed by doping in a specific region of a semiconductor thin film material, so that efficient regulation and control on polarization, a propagation mode, a phase and the like of electromagnetic waves are realized, and the surface is called as a doped super-structure surface. The advantages of the metasurface lie in that compared with a traditional metasurface, the doped metasurface has the unique advantages of no etching micro-nano structure, high smoothness and flatness of the surface, other functional optical thin films such as an optical antireflection film can be allowed to be further plated on the metasurface without changing the optical property of the metasurface. In other words, the doped metasurface can achieve the focusing function of a common metasurface and can be compatible with plating of a functional thin film like a traditional lens surface, and therefore the performance is further improved and expanded.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a non-etching metasurface based on spatial regular doping and compatible with traditional optical thin films. [0002] technical background [0003] In recent years, as a highly innovative concept in the field of optics, metasurface has attracted widespread attention. A metasurface is a two-dimensional functional planar structure composed of many subwavelength nanostructure units. By utilizing the interaction between the subwavelength structure and the incident light field, the intensity, phase, and polarization of the spatial light field can be efficiently controlled. Subvert traditional optical components and functions from the principle level. The lens made of metasurface—Metalens, is thin and flat, and can effectively focus and image light waves. It may replace the complex and bulky lens groups in traditional optical systems, making mobile phones, cameras, surveilla...

AI Technical Summary

Problems solved by technology

Although the metasurface designed based on the all-dielectric nano-unit structure has greatly improved the utilization rate of light energy compared with the metal metasurface, the scattering of the unit structure and the equivalent admittance of the metasurface layer do not match the incident medium and substrate. Defects lead to limited improvement in light energy utilization

In addition, dielectric metasurfaces are usually composed of high-refractive-index dielectric columns with a length comparable to the wavelength of light, such as figure 1 As shown in a, when used in the mid-to-far infrared band, the depth-width ratio of the dielectric column is large, and the technical processing is very difficult, and it is even difficult to manufacture

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