Laser separation machining method and device for optical crystal

Abstract

The invention discloses a laser separation machining method and a laser separation machining device for optical crystal. The method comprises the following steps of: simply roughly rubbing and polishing the convex-concave surface of the optical crystal along a laser separation machining locus, and cleaning a hydrolysis atomization layer and impurities on the surface to form a transparent locus of which the width is greater than the diameter of a laser incident light spot; uniformly coating a saturated solution of the same optical crystal material on the surface of the wiped optical crystal to fill the convex-concave part of the surface of the optical crystal; and performing scanning separation machining by adopting laser along the locus of the saturated solution of the optical crystal. The device comprises a laser machining system and a solution coating system; and a laser focusing device, a solution coating device, a wiping device, a polishing device and a polishing device are sequentially arranged on a linear moving mechanism along the X-axis direction. By the method and the device, a non-fragmented optical crystal sheet with high separation precision, abrupt separation machining port, smooth cut separation surface and high separation quality can be obtained, and negative effects caused by over high laser temperature can be effectively inhibited.

Description

technical field [0001] The invention belongs to the technical field of laser processing applications, and in particular relates to a method and device for laser separation and processing of transparent optical crystals. The method is especially suitable for optical crystal blanks that have not been professionally polished. Background technique [0002] Transparent optical crystals, such as phosphate KDP, DKDP, potassium titanyl phosphate (KTP), lithium triborate LiB3O5 (LBO), and LiNbO3 (LN), KNbO3 (KN), potassium dihydrogen phosphate (KDP), Crystals such as ammonium dihydrogen phosphate, BaTiO3 and Gd(MoO4)3 have long been considered as good electro-optic materials, and have been widely used in optoelectronic technology. They are important materials for frequency multipliers in high-power drivers and electro-optic devices. , has been widely used in nonlinear optics for frequency doubling, sum frequency, difference frequency and frequency mixing of light. In particular, KDP...

AI Technical Summary

Problems solved by technology

However, the high-precision polishing and leveling of anisotropic, soft, brittle high-optical crystals is not only cumbersome, complicated, time-consuming and labor-intensive, but also easily breaks during the polishing and leveling process, and it needs to be done again after separation. Polishing undoubtedly increases the processing difficulty of optical crystals

[0006] 2. The slits produced by laser thermal separation processing of transparent optical crystals will change the refractive index of the optical crystals due to the entry of air, causing the transmission direction of the laser beam to change, not only dissipating the laser energy, causing the separation depth to become shallower and the refracted laser The energy is absorbed by the optical crystal and causes the optical crystal to burst, resulting in loss of control of the separation processing direction and destruction

[0007] 3. The heat generated during laser thermal separation and processing of transparent optical crystals will cause the temperature of the end surface material of the separation port to be too high, which will change the optical properties of the optical crystal, and will also lead to an increase in the roughness of the end surface

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