Device capable of improving aluminum oxidation surface quality

Abstract

The invention discloses a device capable of improving the aluminum oxidation surface quality, and belongs to the technical field of aluminum oxidation equipment. The device capable of improving the aluminum oxidation surface quality comprises a chemical combination bin, a heating plate, a film coating bin and a workpiece, the film coating bin is located at the upper end of the chemical combination bin, the workpiece is located in the film coating bin, an aluminum gas pipe and an oxygen pipe are connected to the outer wall of the chemical combination bin in a penetrating mode, an exhaust port is formed in the lower side wall of the chemical combination bin, annular air bags are arranged in the chemical combination bin, and an air inlet communicates with the film coating bin. According to the device, carbon reserved in the chemical combination bin can be burnt completely before the aluminum oxide gas is prepared in the chemical combination bin, so that the problem that toxic aluminum nitride and carbon monoxide gas are generated when the aluminum oxide gas is prepared is effectively avoided; and meanwhile, the air bags in the chemical combination bin can expand along with temperature rise, gas can only pass through the inner sides of the air bags, the space between the inner sides of the air bags becomes smaller when the temperature rises, the gas passing amount is reduced, and the problem that the workpiece surface quality is reduced due to excessive sprayed aluminum oxide gas is effectively avoided.

Description

technical field [0001] The invention belongs to the technical field of aluminum oxidation equipment, and more specifically relates to a device capable of improving the surface quality of aluminum oxidation. Background technique [0002] In a vacuum environment, the technique of heating and depositing materials onto a substrate is vacuum evaporation. Specifically, vacuum evaporation is a process in which the substance to be formed into a film is evaporated or sublimated in a vacuum, so that it is deposited on the surface of the workpiece or substrate. The metal coating in vacuum evaporation is usually an aluminum film, but other metals can also be formed by evaporative deposition. With the rapid development of my country's electrolytic aluminum, ceramics, medicine, electronics, machinery and other industries, there is still a large room for growth in the market demand for alumina, and the output of alumina will continue to increase. [0003] In the existing vacuum evaporati...

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Problems solved by technology

[0006] Aiming at the problems existing in the prior art, the object of the present invention is to provide a device that can improve the surface quality of aluminum oxide, which can burn up the reserved carbon in the compound chamber before the alumina gas is prepared in the compound chamber, and The continuous supply of oxygen ensures the discharge of carbon dioxide gas in the compound chamber, effectively avoiding the problem of generating toxic aluminum nitride and carbon monoxide gas when preparing alumina gas. At the same time, the air bag in the compound chamber will expand as the temperature rises, and the It can only pass through the inner side of the airbag, the temperature rises and the inner side of the airbag becomes smaller, and the gas passage decreases, which effectively avoids the problem of excessive aluminum oxide gas being ejected, resulting in a decrease in the surface quality of the workpiece.

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