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Developing solution composition used in silicon-based OLED manufacturing process

A developer solution and composition technology, applied in the field of silicon-based OLED manufacturing, can solve the problems that the dispersion stability of surfactants cannot reach the high PPI fineness of the product, it is difficult to meet the process requirements of silicon-based OLEDs, and silicon-based materials are not suitable. , to achieve the effect of enhancing the water solubility of salts, excellent uniformity, and improving requirements

Active Publication Date: 2021-09-28
福建省佑达环保材料有限公司
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Problems solved by technology

Therefore, higher and more stringent requirements are put forward for the process in terms of fineness. In addition, silicon-based materials and traditional displays based on glass and flexible displays based on polyimide or polyester film are different in materials, resulting in The developer used in the traditional process is difficult to meet the process requirements of silicon-based OLEDs
Specific to the developer, the traditional KOH system developer is not suitable for silicon-based materials and is prone to undercut phenomenon (Under Cut), and the dispersion stability of the commonly used surfactants in the KOH system developer cannot reach the high PPI of the product Fine technical requirements

Method used

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  • Developing solution composition used in silicon-based OLED manufacturing process
  • Developing solution composition used in silicon-based OLED manufacturing process
  • Developing solution composition used in silicon-based OLED manufacturing process

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[0017] The experimental methods used in the following examples are conventional methods unless otherwise specified.

[0018] The materials and reagents used in the following examples can be obtained from commercial sources unless otherwise specified.

[0019] The following examples further illustrate the present invention, but the present invention is not limited to the scope of the described examples.

[0020] Examples and comparative examples

[0021] According to the formula in Table 1, the developer solution for silicon-based OLED manufacturing process was prepared. The specific preparation method was to add deionized water to the stirring tank at room temperature, and then add inorganic alkali, organic solvent, non-ionic surfactant and For heterocyclic surfactants containing fluorine, each material is put in and stirred until the system is clear before adding the next material. After all the addition is complete, stir for another 30 minutes, and then filter through filt...

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Abstract

The invention aims to provide a developing solution composition used in the silicon-based OLED manufacturing process and a preparation method of the developing solution composition. The developing solution is prepared by compounding a specific fluorine-containing heterocyclic surfactant component and a non-ionic surfactant phenethyl phenol polyoxyethylene oleyl ether surfactant, the obtained developing solution is high in permeability and uniform in dispersity, high-resolution patterns can be quickly and effectively obtained, and meanwhile, particles obtained after photoresist reaction have excellent dispersity and few residues.

Description

technical field [0001] The invention relates to the field of silicon-based OLED manufacturing, in particular to a developer composition used in the silicon-based OLED manufacturing process and a preparation method thereof. Background technique [0002] Silicon-based organic light-emitting semiconductor (Organic Electroluminescence Display, OLED) as a technical branch of display technology, using single-crystal silicon wafer (Wafer) as the substrate, in addition to OLED self-illumination, thin thickness, light weight, large viewing angle, short response time In addition to the characteristics of high luminous efficiency and high luminous efficiency, it is easier to achieve high PPI, small size, easy to carry, and low power consumption. Its products are mainly used in near-eye display systems in the fields of helmet displays, smart glasses, electronic viewfinders, and VR / AR. And other ultra-small, high-resolution display fields. [0003] With the promotion of 4k and 8k techno...

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Application Information

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IPC IPC(8): G03F7/32B01F15/00B01D29/00B01D29/56B01F13/10
CPCG03F7/322B01D29/56B01D29/15
Inventor 刘小勇田博房龙翔叶鑫煌
Owner 福建省佑达环保材料有限公司
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