Micro-displacement measurement system and measurement method with picometer-scale resolution

Abstract

The invention discloses a micro-displacement measurement system and a measurement method with a resolution of picometer level. The system includes a probe module, an optical path module, a static phase-locked amplification processing module, a host computer acquisition and processing module and a micro-displacement drive module, wherein The probe module includes: measuring FBG sensor, matching FBG sensor, precision stainless steel needle tube, and external support; the optical path module includes: ASE broadband light source, the first circulator, the second circulator, and InGaAs photodetector; the upper computer acquisition and processing module includes: Data acquisition card, computer; micro-displacement drive module includes: piezoelectric ceramic nano-positioner, piezoelectric ceramic driver, and three-dimensional precision micro-movement stage. The invention can realize the detection of micro-displacement, has micro-displacement measurement resolution of picometer level, sensitivity of nanometer level and lower noise level, so it has strong robustness to measurement environment interference and stable operation , the advantages of better performance and lower cost.

Description

technical field [0001] The invention relates to micro-nano measurement, more specifically to a micro-displacement measurement system and a measurement method based on the fiber Bragg grating sensing principle. Background technique [0002] In recent years, nanotechnology has developed rapidly, semiconductor technology, microelectronics technology, and microelectromechanical systems (MEMS) have developed rapidly, and the precision of modern manufacturing has been rapidly improved. The geometric dimensions of the fabricated micro-devices are almost in the micro-nano level. To precisely measure these micro-devices, special high-precision detection methods and technical equipment must be developed. [0003] Small coordinate measuring machines and various probe measurement systems are the core technologies and instruments in the field of high-precision micro-nano measurement. Measurement Sensitivity and Expanded Applicability. In recent years, many research institutions in the ...

AI Technical Summary

Problems solved by technology

The contact trigger probe commonly used in three-coordinate measuring machines is difficult to accurately capture the trigger point due to the existence of pre-travel, the "golf ball effect" produced by the ball at the end of the contact at the moment of contact, and the limitation of the sensitivity of the detection system. The improvement of its measurement accuracy and resolution

Images