Silicon optical chip end face coupling structure resistant to high input optical power

Abstract

The invention provides a silicon optical chip end face coupling structure resistant to high input optical power, which can realize high optical power input and multi-path output on a silicon-based optical chip, and comprises an end face coupling unit, a first connecting unit, a power beam splitting unit, a second connecting unit, a conversion unit and a third connecting unit. Compared with a silicon-based end face coupler, the coupler can bear higher input optical power; the method is compatible with an existing silicon-based semiconductor manufacturing process, and low-cost manufacturing and large-scale production are facilitated; loss between the optical fiber and the silicon-based optical waveguide is reduced; and the conversion unit can be coupled with a silicon-based device, the coupling loss is very low, and large-scale integration with a silicon optical chip is easy to realize.

Description

technical field [0001] The invention belongs to the technical field of semiconductor integration, and in particular relates to a silicon optical chip end face coupling structure with high input optical power resistance. Background technique [0002] For the commercial application of silicon photonics integration, one of the key challenges is to achieve low-loss optical coupling between optical fibers and silicon optical chips, especially the optical coupling between standard single-mode optical fibers, that is, SMF-28, and silicon optical chips. So far, various end-face couplers based on silicon have been proposed, and the coupling loss of a single end face can reach 2-3dB, but when coupled with a single-mode fiber, it still faces the problem of large absorption loss. [0003] In addition, silicon materials have strong second-order nonlinear absorption coefficients, including two-photon absorption (TPA, Two-photonabsorption) and TPA-induced free-carrier absorption (FCA, free...

AI Technical Summary

Problems solved by technology

When the coupled optical power is large, the silicon waveguide will produce a large nonlinear loss, resulting in a decrease in transmittance; further increasing the coupled optical power, even leads to irreversible damage to the silicon waveguide

Generally speaking, silicon-based end-face couplers can withstand low optical power, and generally can withstand optical power <19dbm, 80mW. For the application scenarios of silicon-based integrated chips that require high input optical power, such as lidar, silicon-based The end-face coupling scheme of the end-face coupler is no longer applicable

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