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Manufacturing process and equipment of rotary target material

A manufacturing process and technology of rotating targets, which is applied in metal material coating process, ion implantation plating, coating, etc., can solve the problems of low impurity content of rotating targets, difficulty in obtaining uniform alloy rotating targets, high density, etc.

Pending Publication Date: 2021-10-29
昆山祁御新材料科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The advantage of this manufacturing method is that the obtained rotating target has low impurity content, high density, and large-scale production; the disadvantage is that it is difficult to obtain the composition of the alloy melt composed of two or more metals with a large difference in melting point and density. Homogeneous Alloy Rotating Targets

Method used

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  • Manufacturing process and equipment of rotary target material
  • Manufacturing process and equipment of rotary target material
  • Manufacturing process and equipment of rotary target material

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0076] This embodiment provides a zinc-tin rotating target, which is prepared according to the following preparation process:

[0077] (1) Make the lifting platform 175 carry the molten pool 130 with the mold down to the lowest position; insert the liner pipe 001 vertically into the molten pool 130, and pass through the crystallizer fixed at the bottom opening of the molten pool 130 out, and ensure concentricity with the crystallizer, the two ends of the inner liner 001 are clamped by the upper clamp 181 and the lower clamp 182 in the liner fixing device.

[0078] (2) Heat the lining pipe 001 and the molten pool 130 to 375°C, keep warm, and wait for casting; select Zn metal blocks with a purity of 99.99% and Sn metal blocks with a purity of 99.99%. Considering that Sn is easier to oxidize than Zn, ZnSn alloy Weigh Zn metal block and Sn metal block according to Zn49.5%, Sn50.5% by weight, put into melting furnace 110 to melt, and heat the temperature of the molten metal to 30°C...

Embodiment 2

[0082] This embodiment provides a zinc-tin rotating target, the process of which is basically the same as that of Embodiment 1, the difference is that in this embodiment, the melting furnace 110 heats the temperature of the molten metal to 50°C above the liquidus line; the lifting platform 175 walks upwards at a speed of 2.5cm / min.

Embodiment 3

[0084] This embodiment provides a zinc-tin rotating target, the process of which is basically the same as that of Embodiment 1, the difference is that in this embodiment, the melting furnace 110 heats the temperature of the molten metal to 70°C above the liquidus line; the lifting platform 175 walks upwards at a speed of 3cm / min.

[0085] In summary, the manufacturing process and equipment of the rotating target in the embodiment of the present application are used to manufacture a rotating target with high purity and uniform composition.

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Abstract

The embodiment of the invention provides a manufacturing process and equipment of a rotary target material, and relates to the technical field of casting. The manufacturing process of the rotary target material mainly comprises the following steps that a lining pipe is vertically inserted into a molten pool, and penetrates out of a crystallizer fixedly arranged at an opening at the bottom of the molten pool; alloy melt is injected into the molten pool; and the crystallizer is started, so that the crystallizer relatively moves upwards along the lining pipe until the alloy melt gradually wraps the surface of the lining pipe along the lining pipe and is solidified to form a continuous cast ingot. The manufacturing equipment of the rotary target material comprises a lifting platform configured to be capable of vertically lifting and moving, the molten pool used for containing the alloy melt and a lining pipe fixing device, the molten pool is fixedly arranged on the lifting platform, and the crystallizer is fixedly arranged at the opening at the bottom of the molten pool; and the lining pipe fixing device is used for fixing the lining pipe and enabling the lining pipe to be vertically inserted into the molten pool and penetrate out of the crystallizer. The manufacturing process and equipment of the rotary target material are used for manufacturing the rotary target material with high purity and uniform components.

Description

technical field [0001] The present application relates to the field of casting technology, in particular, to a manufacturing process and equipment for a rotating target. Background technique [0002] The sputtering target is the key material for preparing the surface electronic thin film. Since the utilization rate of the planar target can only reach about 40%, in order to improve the utilization rate of the target, people have designed a more efficient rotating target. material by sputter coating. The rotating target is in the shape of a cylinder, and there are static magnets inside. When working, the target rotates slowly, and its utilization rate can be as high as 80%. [0003] At present, the manufacturing of rotating targets mainly adopts the melting casting method. Firstly, the alloy raw materials with a certain composition ratio are smelted into an alloy melt, and the inner liner is placed vertically in the center of the mold, and then the alloy melt is poured into t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35B22D19/08B22D11/00B22D11/14C22C13/00
CPCC23C14/3414C23C14/35B22D19/08B22D11/001B22D11/006B22D11/14C22C13/00
Inventor 张佼万祥辉
Owner 昆山祁御新材料科技有限公司