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High-frequency response two-dimensional photoelectric auto-collimation method and device based on wavefront correction

A photoelectric self-collimation and wavefront correction technology, which is applied in the direction of optical devices, measuring devices, optics, etc., can solve the problem that it is difficult for autocollimators to achieve nano-arc-level angle measurement, and it is difficult for autocollimators to achieve high-precision angles. Measure and limit the technical indicators of the autocollimator and the use environment to achieve the effect of improving imaging quality and spot positioning accuracy, improving spot imaging quality, and improving spot positioning accuracy

Pending Publication Date: 2021-11-12
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The collimating objective lens is a single lens, the focal length is generally about 500mm and it is difficult to continue to improve. The limit displacement resolution of commonly used photoelectric sensors is between 30 and 50nm. The aberration of the lens optical system is large, the positioning error of the photoelectric sensor spot is large, and it is difficult for the autocollimator to achieve high-precision angle measurement; the light source of the autocollimator is generally a laser light source. Angle drift, it is difficult for an autocollimator to achieve high stability measurement; the structure itself does not have any compensation links, and is easily affected by external disturbances, such as air disturbances under long-distance measurement conditions will cause additional angular drift of the reflected beam, Reduce the measurement accuracy and stability of the autocollimator
[0007] To sum up, traditional optoelectronic autocollimators are affected by many factors such as hardware limitations of the optical system and sensors, sensitivity to the measurement environment, and influence by air disturbances, which greatly limit the technical indicators and use environment of the autocollimator, making it difficult to Achieve long-distance, high-resolution, high-precision, high-stability nano-arc-level angle measurement tasks in complex environments

Method used

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  • High-frequency response two-dimensional photoelectric auto-collimation method and device based on wavefront correction

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specific Embodiment 1

[0042] This embodiment is a high-frequency sound two-dimensional photoelectric self-accessed method and apparatus embodiment based on wavefront correction.

[0043] This embodiment is based on high frequency sound two-dimensional photoelectric self-accessed devices, structural diagrams such as wavefront, respectively. image 3 Indicated. The angular measuring device includes a first light source 1-1, a second light source 1-2, a first convex lens 1-3, a second convex lens 1-4, a first splitter 1-5, a second splitter 2, an image sensor 3 , First combined lens 4-1, second combination lens 4-2, planar mirror 5, small hole diaphragm 6, first transduction mirror 7, second transform mirror 8, first two-to-color mirror 9, reference reflection Mirror 10, the second two-to-color mirror 11, the third convex lens 12, the pre-wave sensor 13;

[0044] The light beam emitted by the first light source 1-1 and the beam emitted by the second light source 1-2 after the first splitter 1-5, the two be...

specific Embodiment 2

[0067] This embodiment is a high-frequency sound two-dimensional photoelectric self-accessed method and apparatus embodiment based on wavefront correction.

[0068] The high-frequency ring-based optical self-accepted straight device based on wavefrise correction based on the present embodiment is shown. Figure 4 Indicated. Based on the first embodiment, the second transformation mirror 8 is replaced with a definitive mirror 14 and a deformed mirror driver 15.

[0069] The high-frequency ring-based two-dimensional self-accepted method based on the wavefront response correction of the present embodiment includes the following steps:

[0070] Step A. Secure the planar mirror 5 to the surface of the subject;

[0071] Step b, light two laser light sources 1-1 and 1-2, adjust the position of the measured object and the planar mirror 5, the geometry center of the measured beam spot image received in the image sensor 3 is in the center position of the sensor;

[0072] Step c, the pre-wave...

specific Embodiment 3

[0079] This embodiment is a high-frequency sound two-dimensional photoelectric self-accessed method and apparatus embodiment based on wavefront correction.

[0080] The high-frequency ring-based optical self-accepted straight device based on wavefrise correction based on the present embodiment is shown. Figure 5 Indicated. On the basis of the specific embodiment, the present embodiment adds a spatial light modulator 16 between the first splitter 1-5 and the small hole diaphragm 6, replacing the second transforming mirror 8 as a definitive mirror 14 and a deformed mirror driver. 15.

[0081] The high-frequency ring-based two-dimensional self-accepted method based on the wavefront response correction of the present embodiment includes the following steps:

[0082] Step A. Secure the planar mirror 5 to the surface of the subject;

[0083] Step b, light two laser light sources 1-1 and 1-2, adjust the position of the measured object and the planar mirror 5, the geometry center of the m...

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Abstract

The invention belongs to the technical field of precision testing and metering, and provides a two-dimensional photoelectric auto-collimation method and device based on wavefront sensing and correction. According to the invention, wavefront measurement and correction links are added in a traditional autocollimator measurement method, the wavefront distortion information of a reference light path in the instrument is measured, distortion phases are compensated by driving a deformable mirror, the aberration of the optical system of the autocollimator is measured, regulated and controlled, the imaging quality and light spot positioning precision of the optical system are improved, and the angle measurement precision of the autocollimator is further improved; the angle measurement and correction processes are carried out at the same time, and the measurement speed of the autocollimator is improved. And meanwhile, the link is introduced, so that the autocollimator has the capability of resisting external environment interference, and the resolution and the stability of angle measurement of the autocollimator are further improved. According to the method, the autocollimator has the angle resolution of nano-radian magnitude (5*10<-9> rad, namely 0.001'') and the angle measurement precision of submicro-radian magnitude (10<-7> rad, namely 0.02''). The method has the technical advantages of achieving angle measurement with high frequency response, high resolution, high precision and high stability under the same condition, and meanwhile has the capacity of resisting environmental disturbance and compensating errors caused by disturbance.

Description

Technical field [0001] The present invention belongs to the technical field test measurement precision, particularly relates to a high frequency response of a two-dimensional photoelectric autocollimator wavefront correction method and apparatus based. Background technique [0002] With the development of the field of ultra-precision manufacturing, large equipment manufacturing, big science projects, the urgent need to achieve high resolution, high precision and high stability at large measurement range, but there is a certain immunity to the measurement site from collimation angle measurement technology. The technology for the development of these areas play an important supporting role. [0003] In the ultra-precision manufacturing art, from a combination of collimators and flat mirrors, multi-faceted prism may form tolerances and position tolerances of the parts is measured, the angle resolution can reach 0.1 "to 0.001"; in large equipment manufacturing and installation , auto...

Claims

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Application Information

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IPC IPC(8): G01B11/27
CPCG01B11/272G01B11/26G02B27/30
Inventor 于洋石剑陈祥发张玮煊谭久彬
Owner HARBIN INST OF TECH