Silicon-based double-sided vertical cavity surface emitting laser and preparation method thereof

Abstract

The invention provides a silicon-based double-sided vertical cavity surface emitting laser and a preparation method thereof. The silicon-based double-sided vertical cavity surface emitting laser comprises the following structures: a p-type monocrystalline silicon substrate subjected to double-sided polishing; a first p-type buffer layer on a surface in contact with the polished upper surface; a second p-type buffer layer on a surface in contact with the polished lower surface, wherein the material of the first p-type buffer layer is different from the material of the second p-type buffer layer; a short-wave laser emission module, wherein a quantum dot structure of the short-wave laser emission module is a non-doped GaNP / InP / GaNP; wherein the quantum dot structure of the long-wave laser emission module is non-doped GaNAs / InAs / GaNAs. According to the silicon-based double-sided vertical cavity surface emitting laser, a short wave and long wave coexisting VCSEL device can be prepared based on the monocrystalline silicon substrate, and the silicon-based double-sided vertical cavity surface emitting laser can be conveniently applied to communication systems, sensing systems, intelligent control systems and the like which are high in function integration level.

Description

technical field [0001] The invention relates to the technical field of semiconductor lasers, in particular to a silicon-based double-sided vertical cavity surface-emitting laser and a preparation method thereof. Background technique [0002] Semiconductor vertical cavity surface emitting lasers (VCSEL) can achieve different lasing wavelengths by using active region materials with different characteristic wavelengths. Short-wavelength VCSELs with lasing wavelengths in the range of 800-980nm can be used in data centers, 3D sensing, and medical sensing, while long-wavelength VCSELs with lasing wavelengths in the range of 1300-1550nm can be used in long-distance optical communications, vehicle-mounted Radar, industrial long-distance detection and other fields. With the increasing integration of communication, sensing, intelligent control and other systems, the same system often needs two VCSELs with different wavelengths at the same time to suit different application scenarios....

AI Technical Summary

Problems solved by technology

However, integrating short-wavelength and long-wavelength VCSELs on the same material substrate still needs to overcome many technical problems, such as thermal expansion coefficient, lattice matching, etc.

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