Flexible capacitive pressure sensor

A technology of pressure sensors and flexible capacitors, which is applied in fluid pressure measurement, instruments, and force measurement using capacitance changes. It can solve the problems of polymer dielectric layer damage, environmental hazards, etc., and achieve low cost, good stability, and high efficiency. The effect of stability and reliability

Pending Publication Date: 2022-01-04
KUNMING UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, these sensors suffer from the same disadvantages as sensors with microstructured dielectric layers, while damage to some of the polymer dielectric layers can be hazardous to the environment

Method used

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Examples

Experimental program
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Effect test

Embodiment 1

[0022] Embodiment 1: The flexible capacitive pressure sensor includes an ionic hydrogel dielectric layer based on a PVA substrate and activated carbon electrode layers arranged on both sides of the ionic hydrogel dielectric layer, wherein the ionic hydrogel dielectric layer based on a PVA substrate The first layer is to dissolve 1799 type PVA in water at 90°C, then drop the KOH-KI mixed solution into the solution with a dropper, keep stirring until the solution becomes transparent, finally add glycerin, stir and mix well, and mix The solution was poured onto a mold (using a silicon-based hydrophobic template with a groove thickness of 200 μm), vacuum defoaming, and drying at room temperature to obtain a film with a thickness of 90 μm. The mass ratio of PVA:KOH:KI:glycerin was 1:0.5:0.5: 1;

[0023] The activated carbon electrode layer is mixed with PDMS DC184 and PDMS SE1700 in a mass ratio of 1:10 to make a PMDS mixed glue, and the PMDS mixed glue is coated on a glass slide a...

Embodiment 2

[0030] Embodiment 2: The flexible capacitive pressure sensor includes an ionic hydrogel dielectric layer based on a PVA substrate and activated carbon electrode layers arranged on both sides of the ionic hydrogel dielectric layer, wherein the ionic hydrogel dielectric layer based on a PVA substrate The first layer is to dissolve 1799-type PVA in water at 95°C, then drop NaOH-NaI mixed solution into the solution with a dropper, keep stirring until the solution becomes transparent, finally add glycerin, stir and mix well, and mix The solution was poured onto a mold (using a silicon-based hydrophobic template with a groove thickness of 200 μm), vacuum defoaming and drying at room temperature to obtain a film with a thickness of 100 μm. The mass ratio of PVA:NaOH:NaI:glycerin was 1:0.5:0.4: 1;

[0031] The activated carbon electrode layer is mixed with PDMS DC184 and PDMS SE1700 at a mass ratio of 1:9 to make a PMDS mixed glue, and the PMDS mixed glue is coated on a glass slide an...

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Abstract

The invention discloses a flexible capacitive pressure sensor which comprises an ionized water gel dielectric layer based on a PVA substrate and activated carbon electrode layers arranged on the two sides of the ionized water gel dielectric layer. The flexible capacitive pressure sensor can be applied to pressure tests of planar, curved and spherical structures; compared with the prior art, the flexible capacitive pressure sensor has the advantages of being good in stability, high in sensitivity, low in drift and wide in range, and the sensor is simple in preparation process, low in cost and suitable for industrial production and market popularization and application.

Description

technical field [0001] The invention belongs to the technical field of flexible electronics, in particular to a flexible capacitive pressure sensor. Background technique [0002] In recent years, with the increasing demand for diverse electronic devices, flexible electronics have attracted increasing attention due to their wide potential applications in portable and foldable devices. According to different sensing principles, flexible electronic sensors can be classified into four categories: triboelectric, piezoelectric, piezoresistive, and capacitive. Due to the low power consumption, fast response and low drift of capacitive sensors, capacitive sensors have been widely used in many important fields. Nevertheless, the sensitivity still needs to be improved. To solve these problems, small amounts of conductive materials (carbon nanotubes, graphene, metal nanowires, etc.) are incorporated into flexible polymers. However, the sensitivity of the sensor is still low due to t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/14G01L9/12
CPCG01L1/142G01L9/12
Inventor 秦亚飞曾雨卢鑫雨杨有朋
Owner KUNMING UNIV OF SCI & TECH
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