Diamond wire inspection and process control method based on visual system

Abstract

The invention discloses a diamond wire inspection and process control method based on a visual system. The method comprises the following steps: (1) image capturing, (2) image preprocessing, (3) image morphology and threshold processing, (4) carborundum particle number calculation and (5) carborundum feeding power modification according to a particle average value. The diamond wire particle online quality inspection method is ingenious in design, the image processing speed of 300 frames per second is achieved through the diamond wire particle online quality inspection method based on machine vision, the number of diamond wire particles is inspected at a high speed, and the particle accuracy of the whole diamond wire is improved by shortening the spacing distance of each section; machine vision image analysis software transmits diamond wire particle data to an equipment PLC at a speed of 15 times per second, and the controller calculates an average value change according to the transmitted particle number to automatically control the sand feeding power, so that the real-time monitoring and intervention of personnel on equipment are reduced.

Description

technical field [0001] The invention relates to a method for diamond wire inspection and process control based on a vision system. Background technique [0002] With the rise of the high-tech industry in recent years, diamond wire has also been widely used in many fields. Diamond wire is a cutting wire with diamond particles solidified on its surface by electroplating. The quality of diamond wire directly affects the quality and production efficiency of cut silicon wafers. At the same time, competition in the industry has intensified, and quality control has become the top priority. The most important parameter that determines the quality of diamond wire is the number of diamond particles of different particle sizes consolidated on its surface. The traditional diamond wire quality inspection method uses offline detection, and the produced products are placed under a high-power microscopic camera. Taking photos, and then obtaining the quality parameters of the diamond wire ...

AI Technical Summary

Problems solved by technology

The most important parameter that determines the quality of diamond wire is the number of diamond particles of different particle sizes consolidated on its surface. The traditional diamond wire quality inspection method uses offline detection, and the produced products are placed under a high-power microscopic camera. Take a photo, and then obtain the quality parameters of the diamond wire through manual or computer-aided analysis. This method has a slow detection speed and the detection process is not easy to control

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