Method for determining metal electron trajectory depth based on pumping probe analysis
A technology of pump detection and electronics, which is applied in the direction of measuring devices, instruments, and optical devices, can solve the problems of large errors in the depth of electronic ballistics, and the scientific significance of test conditions is not rigorous, etc., to achieve accurate determination and scientific and rigorous analysis methods.
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[0022] Copper films with a thickness of 20nm, 40nm, 60nm, 80nm, and 100nm were deposited on a quartz substrate by magnetron sputtering. Before depositing the film, the substrate was ultrasonically cleaned with acetone, isopropanol, and deionized water for 15 minutes each with a nitrogen gun. Blow off residual moisture to ensure uniform and pure film deposition. During the deposition process, the step meter is used to detect and ensure that the thickness deviation is less than 5%.
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