Intelligent power module production line for ultra-clean room
A technology of intelligent power modules and production lines, which is applied in the fields of electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve the problems of large indoor space in the production workshop, high power cost, and large power consumption for temperature and humidity control, and achieve the reduction of indoor length demand, reduction in power consumption, and reduction in power costs
Pending Publication Date: 2022-03-04
广东汇智精密制造有限公司
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Problems solved by technology
This kind of IPM production line scheme usually puts all the equipment one by one according to the process. Since the equipment in the subsequent process is higher than the equipment in the previous process, the height of the indoor space of the IPM production workshop (clean room) needs to be According to the height margin design of the highest equipment, the indoor space of the production workshop is larger, and the power consumption required to maintain the temperature and humidity control and dust particle control in the production workshop is relatively large, and the power cost is high.
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[0024] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.
[0025] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain each If the relative positional relationship, movement conditions, etc. between the components change, the directional indication will also change accordingly.
[0026] It should also be noted that when an element is referred to as being “fixed” or “disposed on” another eleme...
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The invention discloses an intelligent power module production line for an ultra-clean room, the intelligent power module production line comprises a front procedure equipment group and a rear procedure equipment group, the front procedure equipment group comprises a plurality of first equipment which are stacked, and the height from the first equipment stacked on the uppermost layer to the ground is smaller than the maximum height from the equipment in the rear procedure equipment group to the ground. According to the technical scheme, the indoor space size of the ultra-clean room is reduced, electric energy consumption needed for maintaining indoor temperature and humidity control and dust particle control of the ultra-clean room is reduced, and the electric power cost is reduced.
Description
technical field [0001] The invention relates to the field of power semiconductor manufacturing, in particular to an intelligent power module production line used in a clean room. Background technique [0002] Intelligent Power Module (Intelligent Power Module, IPM) is a power drive semiconductor product that combines power electronics and integrated circuit technology, and has the advantages of high current, low saturation voltage and high withstand voltage of GTR (high power transistor), and The advantages of MOSFET (Field Effect Transistor) high input impedance, high switching frequency and low drive power. Moreover, IPM integrates logic, control, detection and protection circuits inside, which is convenient to use, not only reduces the size of the system, shortens the development time, but also enhances the reliability of the system, adapting to the development direction of today's power devices. [0003] The production workshop of IPM is a super-clean room, and the supe...
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IPC IPC(8): H01L21/67
CPCH01L21/67155H01L21/67144
Inventor 冯宇翔张土明左安超谢荣才
Owner 广东汇智精密制造有限公司