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Transverse magnetic field frequency conversion current control system and single crystal growth defect control method

A transverse magnetic field and current control technology, which is applied in the directions of single crystal growth, single crystal growth, crystal growth, etc., can solve the problems of single crystal rod growth interface defects, inconvenient manual operation of frequency converters, etc., to achieve the solution of single crystal rod growth interface defects Effect

Inactive Publication Date: 2022-03-08
杭州中欣晶圆半导体股份有限公司 +1
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Problems solved by technology

[0004] Aiming at the deficiencies of the prior art, the present invention provides a transverse magnetic field frequency conversion current control system and a single crystal growth defect control method, which solves the problem that the manual operation of the frequency converter is inconvenient during the single crystal growth process and easily leads to the problem of single crystal rod growth interface defects

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  • Transverse magnetic field frequency conversion current control system and single crystal growth defect control method

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Embodiment Construction

[0036] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0037] see Figure 1-10 , the present invention provides a technical solution: a transverse magnetic field frequency conversion current control system, including a combustion chamber 1 and a base 2, the combustion chamber 1 is arranged on the top of the base 2, and the outside of the base 2 is provided with a frequency conversion mechanism 3; the frequency conversion mechanism 3 includes a frequency converter 31 and base plate 32, the model used by the frequen...

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Abstract

The invention discloses a transverse magnetic field frequency conversion current control system and a single crystal growth defect control method.The frequency conversion mechanism comprises a frequency converter and a bottom plate, the outer surface of the frequency converter is fixedly connected with the outer surface of a base, the outer surface of the bottom plate is fixedly connected with the outer surface of the base, and a protective cover is arranged outside the bottom plate; the invention relates to the technical field of single crystal production. According to the transverse magnetic field frequency conversion current control system and the single crystal growth defect control method, the frequency conversion mechanism is arranged, and the position of the slip ring on the resistance rod is changed by sliding the slip ring, so that the current of the control circuit in the frequency converter is changed, and the transverse magnetic field line frequency conversion current is accurately and quickly adjusted through different current values; the requirements in the growth process of the single crystal rod are met, the deficiency of a growth interface of the single crystal rod is avoided, and the problem that the growth interface of the single crystal rod has defects easily caused by inconvenient manual operation of the frequency converter in the growth process of the single crystal rod is solved through the combination of the structures.

Description

technical field [0001] The invention relates to the technical field of single crystal production, in particular to a transverse magnetic field frequency conversion current control system and a single crystal growth defect control method. Background technique [0002] Single crystal means that the particles inside the crystal are regularly and periodically arranged in three-dimensional space, or the whole crystal is composed of the same spatial lattice in the three-dimensional direction, and the arrangement of particles in the whole crystal is long-range order in space; single crystal The entire lattice is continuous and has important industrial applications. [0003] During the growth process of silicon single crystal by the Czochralski method, the current of the transverse magnetic field line needs to be changed according to the needs of the single crystal growth process, so that the convection of the melt can be suppressed to improve the crystal quality of the single cryst...

Claims

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Application Information

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IPC IPC(8): C30B15/20C30B29/06C30B30/04
CPCC30B15/20C30B29/06C30B30/04
Inventor 芮阳马吟霜刘洁
Owner 杭州中欣晶圆半导体股份有限公司
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