Staring type multispectral image sensor based on double-lens array and manufacturing method of staring type multispectral image sensor

Abstract

The invention relates to a staring type multispectral image sensor based on a double-lens array and a manufacturing method of the staring type multispectral image sensor. The manufacturing method comprises the steps that a multispectral light filter array is manufactured on the surface of a back-illuminated image sensor; manufacturing a lower micro-lens array on the lower surface of the optical glass sheet, spin-coating photosensitive bonding glue on the back-illuminated image sensor, and performing graphical processing to form a pattern corresponding to the lower micro-lens array; bonding the optical glass sheet and the back-illuminated image sensor together; manufacturing an upper micro-lens array on the upper surface of the optical glass sheet; and manufacturing a metal electrode. According to the invention, the light inlet mode of the image sensor adopts a backside illumination mode, and the image sensor has the characteristics of high sensitivity, high film system designability and high process controllability. The light filter is based on the F-P etalon principle, the structure is simple, and compared with a traditional multispectral imaging system, a heavy dispersion or interference light splitting system is omitted. By adopting the double-lens structure, the filling factor of the image sensor can be obviously improved, the duty ratio is improved, and the spectrum crosstalk is reduced.

Description

technical field [0001] The invention belongs to the technical field of staring multispectral image sensors, and relates to a staring multispectral image sensor based on a double-lens array and a manufacturing method thereof. Background technique [0002] The purpose of the multi-spectral image sensor is to achieve the acquisition of spectral information of various substances through the combination of spectral recognition technology and imaging technology, so as to achieve the effect of material identification. It has the advantages of strong anti-interference ability and high accuracy of material identification, and can be used in agriculture, water conservancy, medicine, astronomy, military and other fields. Existing multispectral imaging technologies are developing toward high integration, low cost, and miniaturization. In these directions, the current mainstream technical solutions include integrating optical filters on-chip in image sensors or integrating multispectral ...

AI Technical Summary

Problems solved by technology

However, ordinary microlens arrays will cause changes in the incident light angle. For the on-chip integrated filter solution, different incident light angles will cause deviations in the optical path of the incident light in the filter, thereby affecting the spectral accuracy.

In the scheme of integrating multispectral filters on the light window, the surface of the image sensor can be integrated with a microlens array, and the filter exists above the microlens array, but the incident light passing through the filter will be on the surface of the microlens and the filter. There are multiple reflections between the light sheets, resulting in spectral crosstalk. Other methods are needed to reduce this phenomenon, which cannot be completely eliminated.

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