Novel patterned electrode preparation method

Abstract

The invention provides a novel method for preparing an electrode pattern, and the method comprises the steps: placing a photoresist removing solution in a heating and ultrasonic environment, and introducing CDA gas to obtain a treatment solvent. The method comprises the following steps: soaking an electrode product in a treatment solvent, carrying out metal corrosion treatment for a preset period of time, enabling the surface of the electrode to achieve a graphical effect through the metal corrosion treatment, finally fishing out the electrode product from the treatment solvent, washing the electrode product with water, and airing and storing the electrode product to obtain the graphical electrode. According to the method, ethanol amine (MEA) is utilized to easily absorb CO2 in CDA under the heating ultrasonic condition, H3O < + > and HCO3 <-> are generated through a series of chemical reactions and hydrolysis, and then the effect of carrying out metal corrosion treatment on the surface of an electrode is achieved; in the process, a layer of thin hydroxyl is generated on the surface of the electrode at the same time. According to the method, the steps and the process difficulty of an electrode patterning method are reduced, the electrode patterning efficiency is improved, the economic cost and the time cost are reduced, and patterned electrodes can be produced in batches.

Description

technical field [0001] The invention is patented in the field of semiconductor device processing, and in particular relates to a novel method for preparing electrode patterning. Background technique [0002] LED, also known as light-emitting diode, is a commonly used light-emitting device. LED has the characteristics of energy saving, environmental protection, safety, long life, low power consumption, etc., and can be widely used in various indications, displays, decorations, backlights, general lighting and other fields. In the LED manufacturing process, electrode patterning is a very important step. [0003] At present, there are few preparation methods for electrode surface patterning in the LED industry, and the traditional method of electrode patterning is mainly through photolithography and ICP dry etching to obtain standard patterns. The main process is to coat photoresist on the conductive film , after exposure, IPC etching, development, film hardening and other ph...

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problems that the traditional electrode patterning method has many steps in the preparation process, low fault tolerance, complex process and low production capacity, and consumes high time and economic costs at the same time, this application provides a new method for preparing electrode patterning

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