A high-precision photoresist composition and its direct writing system
A photoresist and composition technology, applied in the field of photoresist and femtosecond laser direct writing, can solve the problems of reducing direct writing accuracy, spherical aberration, affecting the quality of light spots, etc., to reduce internal stress and improve mechanical stability , Improving the effect of direct writing accuracy
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0066] (dicyclopentenyl methacrylate)
[0067] Preparation of photoresist: prepare a 20 mL clean brown sample bottle, wash and dry; weigh 6 g of dicyclopentenyl methacrylate, add it to the sample bottle, and weigh 4 g of o-phenylphenol polyoxyethylene ether Acrylate, stirred for 30 min, ultrasonicated for 60 min, and finally shaken for 2-3 h to obtain a well-mixed solution. Weigh 100 mg of 7-diethylamino-3-thienoylcoumarin, add it to the above mixed solution, stir for 30 min, sonicate for 60 min, and shake overnight to complete the dissolution. The refractive index was 1.52 using an Abbe refractometer.
[0068] Substrate cleaning: A 25 mm×25 mm silicon wafer was ultrasonically cleaned in acetone, ethanol, and isopropanol for 15 min, and after drying, it was cleaned with a plasma cleaner for 1 min to remove organic impurities on the surface, and a clean substrate was obtained. Silicon substrate.
[0069] as attached figure 1 As shown, the direct writing system used for t...
Embodiment 2
[0073] (dicyclopentenyl methacrylate)
[0074] Prepare a 20 mL clean brown sample bottle, wash and dry; weigh 8g of dicyclopentenyl methacrylate, add it to the sample bottle, and weigh 9,9-bis[4-(2-hydroxy-3-propene Acyloxypropoxy)phenyl]fluorene 2 g, stirred for 1~3 h, and a uniformly mixed solution can be obtained. Weigh 100 mg of 7-diethylamino-3-thienoylcoumarin, add it to the above mixed solution, stir for 30 min, sonicate for 60 min, and shake overnight to complete the dissolution. The refractive index was measured to be 1.52 using an Abbe refractometer.
[0075] Using the same method as in Example 1, a line writing experiment and a shrinkage rate test were performed.
[0076] After writing, the sample was soaked in propylene glycol methyl ether acetate and isopropanol for 15 minutes respectively, and finally rinsed with clean isopropanol and dried in the air.
Embodiment 3
[0077] Example 3 (ring containing methyl substitution)
[0078] (3,3,5-Trimethylcyclohexylmethacrylate)
[0079] Prepare a 20 mL clean brown sample bottle, wash and dry; weigh 3.5g of 3,3,5-trimethylcyclohexyl methacrylate, add it to the sample bottle, and weigh o-phenylphenol polyoxyethylene ether acrylate 6.5g, stirring for 1~3 h, you can get a well-mixed solution. Weigh 100 mg of 7-diethylamino-3-thienoylcoumarin, add it to the above mixed solution, stir for 30 min, sonicate for 60 min, and shake overnight to complete the dissolution. The refractive index was measured to be 1.52 using an Abbe refractometer.
[0080] Using the same method as in Example 1, a line writing experiment and a shrinkage rate test were performed.
[0081] After writing, the sample was soaked in propylene glycol methyl ether acetate and isopropanol for 15 minutes respectively, and finally rinsed with clean isopropanol and dried in the air.
PUM
| Property | Measurement | Unit |
|---|---|---|
| refractive index | aaaaa | aaaaa |
| refractive index | aaaaa | aaaaa |
| refractive index | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
Login to View More