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Preparation method and sealing process of sealing glass for high-temperature vibration acceleration sensor

A vibration acceleration and sealing glass technology, which is applied in the field of preparation of sealing glass for high-temperature vibration acceleration sensors, can solve problems affecting the localization of high-temperature acceleration sensors, unstable high-temperature insulation performance, and poor product consistency, and achieve excellent airtightness performance, good sealing matching, and good electrical insulation

Active Publication Date: 2022-03-25
XIAN SEAL ELECTRONICS MATERIAL TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, foreign countries restrict the export of this type of special glass, and my country currently has technical barriers to the research and development of this special glass, which leads to certain problems in sealing products, such as complicated sealing process, low yield rate, and poor product consistency , the high-temperature insulation performance is unstable, which affects the process of complete localization of high-temperature acceleration sensors

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] A sealing glass for a high-temperature vibration acceleration sensor, prepared from the following raw materials in terms of molar mass ratio: SiO 2 : 37.72%; Al 2 o 3 : 5.52%; BaO: 40.60%; CaO: 15.40%.

[0032] The above-mentioned raw materials are weighed according to the formula and placed in an ultra-high-speed disperser for mixing and dispersing, so that different raw materials are fully mixed to obtain uniformly dispersed raw materials;

[0033] Put uniformly dispersed raw materials in an alumina crucible with a volume of 250mL; then place it in a liftable silicon-molybdenum furnace, and raise the temperature from room temperature to 300-850°C, keep warm at 300-850°C for 30-60 minutes to promote the decomposition of various salts and acid-base compounds, then raise the temperature to 1450-1650°C at a rate of 8-10°C / min, Keep warm for 1 to 2 hours; stir several times during the period to make the melting material uniform, and obtain completely melted and clarifie...

Embodiment 2

[0045] A sealing glass for a high-temperature vibration acceleration sensor, prepared from the following raw materials in terms of molar mass ratio: SiO 2 : 38.05%; Al 2 o 3 : 8.00%; BaO: 38.60%; CaO: 16.20%. The preparation method of the sealing glass is the same as in Example 1. The thermal expansion coefficient of the prepared sealing glass is α=88.0×10 -7 / °C (25~300°C); softening temperature T f =869.6°C; the sealing reference system for sealing glass powder is 1000-1140°C, 15-30min; density ρ=3.80g / cm 3 , above performance test method is the same as embodiment 1. The prepared sealing glass frit was used to seal the connector, and the sealing process was the same as in Example 1 to obtain a sealed assembly (sensor).

[0046] The high temperature insulation performance, room temperature insulation performance and helium gas leakage rate tests were carried out on the above-mentioned sealed components (sensors). The test results are as follows: at 510°C and 100V voltag...

Embodiment 3

[0048] A sealing glass for a high-temperature vibration acceleration sensor, prepared from the following raw materials in terms of molar mass ratio: SiO 2 : 24.72%; B 2 o 3 : 11.00%; Al 2 o 3 : 5.52%; BaO: 37.60%; CaO: 16.20%; Na 2 O: 1.00%; K 2 O: 2.00%; TiO 2 : 0.50%; CeO 2 : 0.50%; ZnO: 1.00%. The preparation method of the sealing glass is the same as in Example 1. The thermal expansion coefficient of the prepared sealing glass is α=10.5×10 -7 / °C (25~300°C); softening temperature T f =745.8°C; the sealing reference system for sealing glass frit is 1000-1140°C, 15-30min; density ρ=3.77g / cm 3 , above performance test method is the same as embodiment 1. The prepared sealing glass frit was used to seal the connector, and the sealing process was the same as in Example 1 to obtain a sealed assembly (sensor).

[0049] The high temperature insulation performance, room temperature insulation performance and helium gas leakage rate tests were carried out on the above sea...

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Abstract

The invention discloses a preparation method and a sealing process of sealing glass for a high-temperature vibration acceleration sensor, a SiO2-Al2O3-BaO-CaO system is selected, and the matching property of glass-metal sealing is changed by adding a metal oxide, carrying out controllable adjustment on glass components and improving the thermal expansion coefficient of the glass, so that the sealing performance of the glass-metal sealing is improved. Further, the high-temperature insulating property of the sealing glass is improved by adjusting the concentration of the components. According to the invention, the appearance of the sealing product is improved, the sealing process is simplified, and the consistency of the sealing product is high.

Description

technical field [0001] The invention belongs to the field of glass-metal sealing, and relates to a preparation and a sealing process of a sealing glass, in particular to a preparation method and a sealing process of a sealing glass for a high-temperature vibration acceleration sensor. Background technique [0002] With the development of modern information industry, sensors play an increasingly important role in transportation, aerospace, national defense and modern industrial production. There is a huge demand for sensors that can work stably in high-temperature and high-spin environments in the aerospace and precision machinery manufacturing fields. Miniature sensors in harsh environments are an important direction in the research of modern sensing technology. Its connectors are mainly sealed by glass, and the harsh working environment puts forward higher requirements for high temperature resistance and high insulation of glass materials. [0003] The in-situ vibration d...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C03C8/24
CPCC03C8/24Y02P40/57
Inventor 郗雪艳冯庆王哲华斯嘉徐绍华刘卫红杨文波
Owner XIAN SEAL ELECTRONICS MATERIAL TECH CO LTD
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