Flexible pressure sensor based on double-sided engraved laser-induced graphene

A pressure sensor and laser-induced technology, applied in the fluid pressure measurement, instrument, and force measurement using capacitance change, can solve the problems of time-consuming, labor-intensive, and expensive preparation, and achieve the effects of excellent device performance, guaranteed sensitivity, and reduced cost.

Active Publication Date: 2022-04-12
DALIAN UNIV OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the preparation is time-consuming and labor-intensive, and the cost is expensive, but it is an insurmountable gap

Method used

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  • Flexible pressure sensor based on double-sided engraved laser-induced graphene
  • Flexible pressure sensor based on double-sided engraved laser-induced graphene
  • Flexible pressure sensor based on double-sided engraved laser-induced graphene

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Embodiment Construction

[0026] The specific implementation manners of the present invention will be further described below in conjunction with the accompanying drawings and technical solutions.

[0027] The carbon precursor materials used for laser processing mentioned in the present invention include but are not limited to polyimide, and the polyimide thin paper used in this example is a preferred material after comparison, including but not limited to For polyimide thin paper and film of different thickness.

[0028] In this embodiment, the PI paper is cut into a suitable size, and 14 mm×14 mm is preferably used as the substrate material size of the processing electrode from the dimensions of 5 mm×5 mm to 20 mm×20 mm. Use adhesive tape to fix the cut PI paper on the inner bottom plate of the laser, and set the optimal laser processing parameters to laser engrave the surface of the PI paper to form graphene upper electrode patterns.

[0029] The maximum laser power of the semiconductor laser used ...

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Abstract

The invention belongs to the field of pressure sensors, and relates to a flexible pressure sensor based on double-sided engraved laser-induced graphene, which is characterized in that on the basis of a graphene laser engraving technology, graphene is formed on the surfaces of two sides of the same material, and the middle residual part becomes a dielectric layer; and packaging and the like are carried out to prepare the flexible laser-induced graphene pressure sensor. According to the method, the cost is reduced, the preparation period is shortened, the electrode, the dielectric layer and the electrode are formed on the same substrate material by regulating and controlling laser processing parameters, the specific proportion is achieved, the performance of the device is better, and the device can respond to the pressure intensity within the range of 10 Pa-16 kPa. While the sensitivity, the stability and the working range are ensured, the complex independent preparation process is simplified, and the method is a relatively excellent choice.

Description

technical field [0001] The invention belongs to the field of pressure sensors, and relates to a flexible pressure sensor based on double-sided engraving laser-induced graphene. It is a capacitive sensor based on the technology of laser-engraving and ablating carbon precursor materials to form laser-induced graphene (LIG). The change in can measure the amount of applied pressure. Background technique [0002] In daily life, the application of pressure sensors spans various fields. In the fields of electronic equipment touch screen, industrial control environment, mechanical measurement system, etc., pressure sensors play an indispensable role, and the convenience in life and industry brought to us cannot be ignored. As fast, convenient, and low-cost become the guideline for the preparation of pressure sensors, the old generation of sensors has gradually stepped down from the stage, and a storm is brewing in all walks of life for new sensors. [0003] Today's more common gra...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/14G01L9/12
Inventor 张航与赵天聪朱慧超吕军刘波俞克会
Owner DALIAN UNIV OF TECH
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