Nanofluidic chip processing method based on carbon nanotube channel
A carbon nanotube and processing method technology, applied in the field of nanofluidic chip processing, can solve the problems of destroying the integrity of the carbon nanotube wall, poor mechanical stability of the lipid layer, inconvenient chip integration, etc., to achieve integrity , good integrity and high production efficiency
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Example Embodiment
[0047] Example 1
[0048] The specific method of this embodiment is as follows:
[0049] such as Figure 2 (a) spin coating a thin layer of photoresist on a dewatering substrate and heating to cure it. The adopted substrate is a 1mm thick silicon wafer, which is heated to 150℃ at normal pressure and kept for 30 minutes to remove water, and then immediately after the silicon wafer is cooled, spin coating is carried out on the silicon wafer, wherein the spin coating photoresist is SU8-3005, and the spin coating thickness is 5μm, and the solvent is completely volatilized by heating at 95℃ for 2 minutes after spin coating;
[0050] The carbon nanotube thin layer is transferred to a predetermined position on the surface of the photoresist thin layer by pyroelectric method. The specific steps and parameters are as follows: for example Figure 4 (a) separating a bundle of carbon nanotubes from a bundle of carbon nanotubes vertically grown on a silicon wafer by using an adhesive tape, where...
PUM
Property | Measurement | Unit |
---|---|---|
Thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap