Nanofluidic chip processing method based on carbon nanotube channel

Abstract

The invention provides a nanofluidic chip processing method based on a carbon nanotube channel. Comprising the following steps: spin-coating a thin layer of photoresist on a dewatered substrate, and heating to cure the thin layer of photoresist; transferring the carbon nanotube thin layer to a preset position on the surface of the photoresist thin layer through a heat release method; spin-coating another layer of photoresist on the surface of the photoresist thin layer to embed the carbon nanotube into the photoresist thin layer; heating to volatilize the photoresist solvent, then carrying out photoetching operation, processing an open type micron channel system on the substrate, and exposing part of the carbon nano tube in the micro-flow channel after photoetching operation; pouring liquid PDMS into the channel, embedding the carbon nanotube exposed in the channel into the PDMS, and curing and stripping the PDMS to obtain a nanofluidic chip substrate with the carbon nanotube channel; s5, performing plasma oxidation treatment on the PDMS surface, performing plasma surface oxidation treatment on the PDMS surface and the nanofluidic chip substrate of the carbon nanotube channel in S5, and finally performing chip bonding to obtain the nanofluidic chip constructed based on the carbon nanotube. The method is good in integrity and high in manufacturing efficiency.

Description

technical field

[0001] The invention relates to the technical field of nanofluidic chip processing, in particular to a nanofluidic chip processing method based on low-dimensional materials such as carbon nanotube channels. Background technique

[0002] Nanofluidic technology is a science that studies the transmission, manipulation and application of scale molecules, ions, particles and other substances in the nanoscale space (1-100nm). The key to the development of nanofluidic technology lies in the processing of nanofluidic chips, including the construction of nanoscale fluid control systems. The inner diameter of carbon nanotubes is controllable (tens of nanometers to several nanometers) and is comparable to the size of molecules, which provides a pole for detecting and manipulating single nanometer-sized objects, such as cations, deoxyribonucleic acid, small organic molecules and solid nanoparticles. good platform. The uniformity of carbon nanotubes can effectively prom...

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