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Nano-scale micro-displacement measurement system and method based on vortex light spiral wavefront-space phase shift interference

A phase-shift interference and measurement system technology, applied in the field of nano-scale micro-displacement measurement system based on vortex optical helical wavefront-spatial phase-shift interference, can solve the problems of large volume, slow calculation speed, complex structure, etc., and achieve measurement accuracy High, stable and compact system structure

Active Publication Date: 2022-05-10
SHANDONG UNIV
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  • Application Information

AI Technical Summary

Problems solved by technology

Traditional optical interferometers often use dual-beam channels or multi-beam channels for coherent measurement, so the entire measurement system is bulky, complex in structure, expensive, and the measurement range is limited by the coherence length of the light source
And this kind of method usually uses two columns of plane waves to interfere. The interference pattern is a series of black and white parallel straight stripes. The size of the micro-displacement can be obtained by counting the movement of the stripes. The biggest disadvantage is that the movement of the stripes cannot be accurately counted. And it is necessary to develop a special fringe counting algorithm, the calculation speed is slow, and it is difficult to achieve high-precision and fast measurement of micro-displacement at the same time

Method used

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  • Nano-scale micro-displacement measurement system and method based on vortex light spiral wavefront-space phase shift interference
  • Nano-scale micro-displacement measurement system and method based on vortex light spiral wavefront-space phase shift interference
  • Nano-scale micro-displacement measurement system and method based on vortex light spiral wavefront-space phase shift interference

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Experimental program
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Embodiment 1

[0042] Embodiment 1 The present invention first provides a nanoscale micro-displacement measurement system based on vortex optical helical wavefront-space phase shift interference, the structure of which is as follows figure 1 As shown, it includes He-Ne laser 1, polarizer 2, quarter-wave plate 3, first beam splitting prism 4, second beam splitting prism 5, displacement platform 7, polarization camera 8, A third dichroic prism 9 , a spiral phase plate 10 and a mirror 11 .

[0043] Wherein, the function of the quarter-wave plate 3 is to convert the incident linearly polarized light into circularly polarized light output, and the polarization direction of the incident light needs to be strictly at 45° with the optical axis of the quarter-wave plate 3 . The topological charge of the spiral phase plate 10 is 1.

[0044] In this embodiment, the first dichroic prism 4 , the second dichroic prism 5 and the third dichroic prism 9 are all ordinary dichroic prisms without polarization ...

Embodiment 2

[0048] Embodiment 2 The second embodiment provided by the present invention is: adopt the measuring system in embodiment 1, measure the method for micro-displacement of the sample to be tested, this method comprises the following steps:

[0049]1. The test light adopts a left-handed circularly polarized plane wave. Using the measurement system in Example 1, the left-handed circularly polarized plane wave passes through the helical phase plate and becomes a right-handed circularly polarized vortex light, and the right-handed circularly polarized light passes through four micropolarizations in turn. After the phase shift unit, they are:

[0050]

[0051]

[0052]

[0053]

[0054] After the left-handed circular vortex polarized light passes through four micro-polarization phase shift units in sequence, they are:

[0055]

[0056]

[0057]

[0058]

[0059] The basic formula for interference is:

[0060]

[0061] The obtained four phase-shifted interfe...

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Abstract

The invention relates to the technical field of optical interference precision measurement, and relates to a nano-scale micro-displacement measurement system and method based on vortex light spiral wavefront-space phase shift interference. The invention discloses a nanometer level micro-displacement rapid measurement system based on vortex light spiral wavefront-space phase shift interference. The nanometer level micro-displacement rapid measurement system comprises a He-Ne laser, a polarizer, a quarter-wave plate, a first beam splitter prism, a second beam splitter prism, a displacement platform, a reflector, a spiral phase plate, a third beam splitter prism and a polarization camera which are sequentially arranged in the laser transmission direction. The included angle between the polarization direction of the polarizer and the optical axis of the quarter-wave plate is 45 degrees. The measurement system adopts a Mach-Zehnder interferometer structure, and is compact in structure, high in stability and high in measurement precision. A space phase-shift interference measurement structure is adopted, four phase-shift interference patterns can be rapidly captured at the same time, real spiral phase distribution is obtained through demodulation, and rapid measurement of micro-displacement is achieved.

Description

technical field [0001] The invention relates to the technical field of optical interference precision measurement, and relates to a nanoscale micro-displacement measurement system and method based on vortex optical helical wavefront-space phase shift interference. Background technique [0002] The measurement of micro-displacement plays an important role in the research of geometric parameter measurement. In many practical applications such as military industry, aerospace, biomedicine, precision machinery, flow field measurement, micro force measurement and solid surface measurement, there is a need to obtain small displacements of objects, such as: deformation of bridge piers, deformation of dam walls, Workpiece thickness, machine tool contour detection, uterine scar diagnosis and heart rate detection, etc. The laser interferometric micro-displacement measurement technology has always been a research hotspot due to its unique advantages such as non-contact, high measuremen...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02G01B9/02015
CPCG01B11/02G01B9/02034
Inventor 杨忠明杨栋刘兆军
Owner SHANDONG UNIV
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