Extensible electrode flattening integration method based on ultrathin viscous silica gel
A technology of extending electrodes and an integration method, which is applied in the field of flattening and integrating stretchable electrodes, can solve the problems of ultra-thin flexible films such as not easy, easy to break, and self-adhesive, so as to improve conformal contact ability, avoid self-adhesive, and be easy to implement Effect
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Embodiment 1
[0054] figure 1 Schematic diagram of the final flattening tensile experiment of a stretchable electrode based on ultra-thin viscous silica gel. Among them, the ultra-thin viscous silica gel material is Ecoflex 00-10 silica gel produced by Smooth-On Company, the thickness is 50 microns, and it still has a certain viscosity after curing; Composed of Au metal conductive layer, the thickness of a single-layer parylene film is 2 microns, and the thickness of Cr / Au is 20 / 200 nanometers. The overall structure is a serpentine line, which can be used to collect cortical EEG signals, extracranial EEG signals or Skin electrophysiological signals, etc.; the silicone adhesive is Sil-Poxy single-component adhesive produced by Smooth-On, which is brushed on both ends of the ultra-thin viscous silicone substrate; the material of the thick silicone support block is DragonSkin produced by Smooth-On Silicone, 3mm thick. The side parts of the thick silicone support blocks at both ends, together...
Embodiment 2
[0067] In another embodiment, for figure 2 In S2, S3 and S4, the process flow is simplified, and the water-soluble tape only needs to be used once, that is, S2 does not need to remove the water-soluble tape after the stretchable electrode is transferred. In the actual operation process, such as S3, manually cut the ultra-thin viscous silicone with a scalpel, the cutting is easy and the track is clear. After merging and simplifying the process, it is necessary to cut the water-soluble tape and the covered ultra-thin adhesive silicone at the same time. The scalpel cutting method is no longer suitable, which will cause relative slippage between the two, and the edge of the ultra-thin adhesive silicone will not wrinkle. smooth. Therefore, a non-contact laser cutting machine can be used to complete the simultaneous cutting of water-soluble tape and ultra-thin viscous silicone. Considering that the water-soluble tape and ultra-thin viscous silicone are stacked together to a certai...
Embodiment 3
[0069] In another embodiment, the steps of the flat integration process are the same as in Embodiment 1, and the materials of the ultra-thin viscous silica gel, the extensible electrode and the thick silica gel support block are mainly changed as follows:
[0070] The model is SYLGARD TM 182 PDMS silicone kit, the basic components and curing agent are prepared according to the weight ratio of 30:1, after spin-coating, bake in an oven at 80 degrees Celsius for 60 minutes to form an ultra-thin viscous silicone with good adhesion and high transparency on the surface;
[0071] The photolithographic polyimide of the model Durimide 7505 is used, spin-coated and post-baked to obtain a polymer encapsulation layer with a thickness of 2 microns, and the metal conductive layer is Ti / Pt metal with a thickness of 30 / 300 nanometers. The result is a stretchable electrode consisting of two polymer encapsulation layers sandwiched by a metallic conductive layer;
[0072] The model is SYLGARD ...
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