Transducer unit, transducer array, preparation method and energy equipment

A transducer array and transducer technology, applied in the field of microelectronic systems, can solve the problem of small vibration membrane area, and achieve the effect of good sensitivity, good sensitivity and high sound pressure output

Active Publication Date: 2022-05-27
SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
View PDF5 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The object of the present invention is to provide a transducer unit, an array, a preparation method and an energy device, aiming at the problem of the microcomputer piezoelectric ultrasonic transducer in the prior art, which is limited by the small area of ​​the vibrating membrane, thereby improving the vibration The structure of the thin film, thus effectively improving the performance of the transducer

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Transducer unit, transducer array, preparation method and energy equipment
  • Transducer unit, transducer array, preparation method and energy equipment
  • Transducer unit, transducer array, preparation method and energy equipment

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0028] The specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings, but it should be understood that the protection scope of the present invention is not limited by the specific embodiments.

[0029] Unless expressly stated otherwise, throughout the specification and claims, the term "comprising" or its conjugations such as "comprising" or "comprising" and the like will be understood to include the stated elements or components, and Other elements or other components are not excluded.

[0030] like Figure 1 to Figure 6 As shown, in the transducer solution according to the preferred embodiment of the present invention, the transducer unit and the transducer array formed by it can provide an improved small-sized vibrating membrane structure, thereby overcoming the prior art The problems of high frequency, low output sound pressure and insufficient sensitivity caused by small and medium-sized vibrating membrane...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention discloses a transducer unit, an array, a preparation method and energy equipment, the transducer unit comprises a substrate structure and a vibration structure, and the vibration structure comprises a central structure; the ring structure is provided with a gap in a closed mode in the circumferential direction, the gap penetrates through a main body of the ring structure in the direction perpendicular to the circumferential direction, the center structure is arranged in the gap of the ring structure, and a gap is formed between the center structure and the ring structure; the first connecting structure is connected with the central structure and the ring structure; the center structure and the ring structure are both of a multi-layer structure, the center structure and the ring structure are each sequentially provided with at least a second electrode layer, a piezoelectric layer and a first electrode layer in the direction deviating from the substrate structure, and the area of the first electrode layer in the center structure is not larger than that of the piezoelectric layer. According to the invention, the vibration film structure of the transducer is optimized, so that the performances in the aspects of sensitivity, propagation distance, output and the like are effectively improved.

Description

technical field [0001] The present invention relates to microelectronic system technology, in particular to a transducer unit, an array, a preparation method and an energy device. Background technique [0002] Piezoelectric ultrasonic transducer is a kind of mutual conversion of electrical energy and mechanical energy, and then realizes the function of ultrasonic transmission and reception. Traditional ultrasonic transducers mostly use mechanical processing, but such transducers are relatively bulky, have high power consumption, and are not easy to integrate. Microelectromechanical ultrasonic transducers are divided into piezoelectric type and capacitive type. Capacitive ultrasonic transducers require DC bias voltage to work. For traditional piezoelectric ultrasonic transducers with parasitic capacitance, the sound speed of the material is low, which leads to the overall mechanism. The acoustic sensitivity of the transducer is low, and the gap between the impedance and the ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Applications(China)
IPC IPC(8): B06B1/06
CPCB06B1/0607
Inventor 周红宇李加东苗斌张玉超王光华张士钦
Owner SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products