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Silicon nitride waveguide auxiliary cantilever beam end face coupler

A silicon nitride wave and end-face coupling technology, applied in the direction of optical waveguide light guide, instrument, light guide, etc., can solve the problems of low coupling efficiency and polarization sensitivity, and achieve the effect of improving coupling efficiency

Active Publication Date: 2022-06-07
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this patent document still has the defects of low coupling efficiency and polarization sensitivity

Method used

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  • Silicon nitride waveguide auxiliary cantilever beam end face coupler
  • Silicon nitride waveguide auxiliary cantilever beam end face coupler
  • Silicon nitride waveguide auxiliary cantilever beam end face coupler

Examples

Experimental program
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Embodiment 1

[0063] like Figures 1 to 8 As shown, this embodiment provides a silicon nitride waveguide assisted cantilever beam end coupler, including a silicon substrate 1 , a silicon nitride waveguide structure 2 , a silicon waveguide structure 3 , a connecting beam structure 4 and a cantilever beam structure 5 . The cantilever beam structure 5 is connected and arranged on the connecting beam structure 4, the connecting beam structure 4 is connected and arranged on the silicon substrate 1, the silicon substrate 1 is provided with a substrate groove 6, and the cantilever beam structure 5 is suspended above the substrate groove 6 , the silicon nitride waveguide structure 2 and the silicon waveguide structure 3 are arranged in the cantilever beam structure 5, the silicon nitride waveguide structure 2 is located above the silicon waveguide structure 3, and one end of the silicon nitride waveguide structure 2 is arranged at the coupling end face 7, One end of the silicon waveguide structure ...

Embodiment 2

[0069] Those skilled in the art can understand this embodiment as a more specific description of Embodiment 1.

[0070] This embodiment provides a silicon nitride waveguide-assisted cantilever beam end coupler optimized based on a subwavelength grating structure, including a subwavelength grating silicon nitride waveguide structure, a subwavelength grating inverted tapered silicon waveguide structure with graded effective refractive index, and a cantilever beam Structure, cladding structure on silicon oxide.

[0071] Among them, at the coupling end face, the subwavelength grating inverted tapered silicon waveguide structure is covered by a silicon oxide upper cladding layer, the light is coupled near the subwavelength grating silicon nitride waveguide structure, and the subwavelength grating inverted tapered silicon waveguide structure is distributed at a certain distance from the coupling end face. At the distance, with the increase of the effective refractive index of the su...

Embodiment 3

[0076] Those skilled in the art can understand this embodiment as a more specific description of Embodiment 1.

[0077] This embodiment relates to a cantilever beam end-face coupler, which is prepared on an SOI wafer. The SOI wafer includes, from bottom to top, a silicon substrate, a silicon dioxide buried oxide layer, and a top silicon.

[0078] In this embodiment, the thickness of the silicon dioxide buried oxide layer is 3 μm, the thickness of the silicon layer used for preparing the coupler is 220 nm, and the thickness of the cladding layer on the silicon dioxide is 7 μm.

[0079] In this embodiment, a cantilever beam structure is formed by removing part of the silicon substrate, which reduces the leakage of light to the silicon substrate and increases the coupling efficiency. At the coupling end face, a silicon nitride waveguide structure is introduced. The silicon nitride waveguide structure has a small refractive index, which can diffuse light and increase the overlap ...

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Abstract

The invention provides a silicon nitride waveguide auxiliary cantilever beam end face coupler. The silicon nitride waveguide auxiliary cantilever beam end face coupler comprises a silicon substrate, a silicon nitride waveguide structure, a silicon waveguide structure, a connecting beam structure and a cantilever beam structure. The cantilever beam structure is connected to the connecting beam structure, and the connecting beam structure is connected to the silicon substrate; the silicon substrate is provided with a substrate groove, and the cantilever beam structure is suspended above the substrate groove; the silicon nitride waveguide structure and the silicon waveguide structure are arranged in the cantilever beam structure, and the silicon nitride waveguide structure is located above the silicon waveguide structure; one end of the silicon nitride waveguide structure is arranged at the coupling end face, and one end of the silicon waveguide structure and the coupling end face are arranged at intervals; the silicon nitride waveguide structure is a sub-wavelength grating silicon nitride waveguide structure, and the silicon waveguide structure is a sub-wavelength grating inverted cone silicon waveguide structure. The coupling efficiency of the end face coupler is improved, and the polarization sensitivity of the coupler is reduced.

Description

technical field [0001] The invention relates to the technical field of optical devices, in particular to a silicon nitride waveguide-assisted cantilever beam end coupler, in particular to a silicon nitride waveguide-assisted cantilever beam end coupler optimized based on a sub-wavelength grating structure. Background technique [0002] The size difference between ordinary single-mode fiber and silicon waveguide is large, and the direct coupling efficiency is low. Generally, the optical coupling between the fiber and the waveguide is realized by grating coupling and end-face coupling. The grating coupler realizes optical coupling above the chip by means of diffractive optical properties, and the end-face coupler uses the inverted tapered structure to connect the optical fiber and the chip end-face to realize the light source input, but the grating coupling has problems such as low coupling efficiency, polarization sensitivity, and difficulty in packaging. The coupling efficie...

Claims

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Application Information

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IPC IPC(8): G02B6/13G02B6/136G02B6/12
CPCG02B6/13G02B6/136G02B6/12G02B2006/12147G02B2006/12097Y02D30/70
Inventor 程秀兰李雅倩王敏权雪玲刘民王晓东
Owner SHANGHAI JIAO TONG UNIV