1results about How to "Reduce polarization sensitivity" patented technology

This invention relates to a transmission grating and its manufacturing method, comprising a substrate having a first surface along its thickness direction; a grating layer including grating teeth arranged in an array on the first surface, with gaps between adjacent grating teeth; the grating teeth having a two-segment tower-shaped structure, each grating tooth including an upper grating block and a lower grating block, the lower grating block being connected to the first surface; a first dielectric layer disposed on the surface of the grating layer and filling the gaps to form a continuous layer structure; a second surface on the side of the first dielectric layer away from the substrate; a groove formed on the first dielectric layer opposite to the gaps; a second dielectric layer disposed in the groove, the second dielectric layer having a third surface, the edge of the third surface being connected to the second surface. This invention, by designing a tower-shaped grating tooth layer and dielectric film layer structure, can obtain a transmission grating with high diffraction efficiency and low polarization sensitivity, resulting in a more stable grating morphology and facilitating precise processing.