2results about How to "Reduce polarization sensitivity" patented technology

The invention discloses a wide-angle phase difference depolarization reflector with silicon as a substrate. According to the reflector, the metal nickel-chromium film layer and the metal silver film layer are combined, so that the binding force between the silicon substrate and the metal film layer is improved; high reflectivity and low polarization sensitivity of a signal channel are realized by utilizing the characteristics of the metal film layer; the metal film layer is prevented from being oxidized by using the protective layer, so that the reflecting mirror has relatively high environmental adaptability; and phase difference depolarization in a wide angle range of a signal channel is realized by utilizing a plurality of dielectric phase suppression film layers. The wide-angle phase difference depolarization reflector with the silicon substrate has the advantages that the number of film layers is small, the technology is easy to implement, and reliability is good.

This invention relates to a transmission grating and its manufacturing method, comprising a substrate having a first surface along its thickness direction; a grating layer including grating teeth arranged in an array on the first surface, with gaps between adjacent grating teeth; the grating teeth having a two-segment tower-shaped structure, each grating tooth including an upper grating block and a lower grating block, the lower grating block being connected to the first surface; a first dielectric layer disposed on the surface of the grating layer and filling the gaps to form a continuous layer structure; a second surface on the side of the first dielectric layer away from the substrate; a groove formed on the first dielectric layer opposite to the gaps; a second dielectric layer disposed in the groove, the second dielectric layer having a third surface, the edge of the third surface being connected to the second surface. This invention, by designing a tower-shaped grating tooth layer and dielectric film layer structure, can obtain a transmission grating with high diffraction efficiency and low polarization sensitivity, resulting in a more stable grating morphology and facilitating precise processing.