The invention provides a double-layer
silicon nitride grating coupler for a visible
light wave band. The double-layer
silicon nitride grating coupler comprises a substrate, a lower cladding, a first layer of
silicon nitride, an interlayer, a second layer of
silicon nitride and an upper cladding from bottom to top, the first layer of
silicon nitride comprises a first layer of
silicon nitride grating and a silicon nitride
waveguide, and the second layer of silicon nitride is a second layer of silicon nitride grating and is output by the lower layer of silicon nitride
waveguide, so that relatively high
coupling efficiency is realized. Due to the visible
light wave band, the thickness of the first layer of silicon nitride and the second layer of silicon nitride does not exceed 500nm. According to the double-layer silicon nitride grating coupler, the vertical symmetry of gratings is broken through, high-
directivity propagation of light
waves is achieved through proper position arrangement of the two
layers of silicon nitride gratings, and meanwhile the
refractive index contrast ratio and the
coupling efficiency can be improved through the double-layer gratings; on the premise that the grating period is not affected, the technology of the double-layer silicon nitride grating coupler manufactured based on the two uniform fully-etched gratings is simple.