Wear-resistant TiSiCN nano-composite multilayer coating and preparation method thereof

A multi-layer coating and nano-composite technology, which is applied in coating, metal material coating process, vacuum evaporation plating, etc., can solve the problems that cannot meet the requirements of better performance of materials, and achieve huge market potential and use value , low production cost, and improved mechanical wear resistance

Pending Publication Date: 2022-07-01
ZHEJIANG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] At present, there are multi-component coatings that add elements such as Cr and Al to TiN coatings to form multi-component coatings, such as TiCrN and TiAlN coatings, which have higher mechanical wear resistance than TiN and TiCN coatings, and the application temperature of the coatings is also lower. It has been raised to above 800°C, but it still cannot meet the requirements of modern industry for better performance of materials. Recently, Si-added nanostructure TiSiN, TiSiCN, AlTiSiN and other coatings have the characteristics of high hardness and high temperature oxidation resistance. One of the development directions, if it is a multi-layer structure, the hardness and toughness of the coating can be further improved

Method used

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  • Wear-resistant TiSiCN nano-composite multilayer coating and preparation method thereof
  • Wear-resistant TiSiCN nano-composite multilayer coating and preparation method thereof
  • Wear-resistant TiSiCN nano-composite multilayer coating and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0037]1) After degreasing and polishing the surface of the stainless steel, put it into acetone for ultrasonic cleaning. After cleaning, the substrate is cleaned with alcohol, then dried with nitrogen and placed on the turret 15 of the vacuum chamber 1 of the coating equipment. Pump to vacuum less than 5×10 -4 Pa, while heating to 400 ℃;

[0038] 2) First pass Ar gas into the vacuum chamber, adjust the intake flow rate through the flow meter, keep the air pressure of the vacuum chamber at 1.0Pa, then turn on the bias power supply, adjust the bias value to -1000 V, and carry out Ar glow cleaning on the workpiece The time is 10-20 min; then, a Ti target power supply is turned on at the same time, the DC mode is adopted, the DC current is 120 A, the air pressure of the vacuum chamber is kept at 1.0 Pa, the bias value is -1000 V, and the workpiece ion cleaning time is 10 min , to obtain the workpiece to be plated;

[0039] 3) Deposition of transition layer Ti / TiN / TiCN: turn on t...

Embodiment 2

[0045] 1) After degreasing and polishing the surface of the stainless steel, put it into acetone for ultrasonic cleaning for 5-10 minutes. After cleaning, the substrate is cleaned with alcohol, then dried with nitrogen and placed on the turret 15 of the vacuum chamber 1 of the coating equipment. , pump the vacuum chamber 1 to a degree of vacuum less than 5×10 -4 Pa, while heating to 400 ℃;

[0046] 2) First pass Ar gas into the vacuum chamber, adjust the intake flow rate through the flow meter, keep the air pressure of the vacuum chamber at 1.0Pa, then turn on the bias power supply, adjust the bias value to -600 V, and perform Ar glow cleaning on the workpiece The time is 5-10 min; then, a Ti target power supply is turned on at the same time, the DC mode is adopted, the DC current is 30 A, the air pressure of the vacuum chamber is kept at 0.3 Pa, the bias value is -600 V, and the workpiece ion cleaning time is 1 min , to obtain the workpiece to be plated;

[0047] 3) Deposit...

Embodiment 3

[0052] 1) After degreasing and polishing the surface of the high-speed steel, put it into acetone for ultrasonic cleaning for 5-10 minutes, and then clean the cleaned substrate with alcohol, then dry it with nitrogen and place it on the turret 15 of the vacuum chamber 1 of the coating equipment. , pump the vacuum chamber 1 to a degree of vacuum less than 5×10 -4 Pa, while heating to 400 ℃;

[0053] 2) First pass Ar gas into the vacuum chamber, adjust the intake flow rate through the flowmeter, keep the air pressure of the vacuum chamber at 0.8 Pa, then turn on the bias power supply, adjust the bias value to -1000 V, and carry out Ar glow cleaning on the workpiece The time is 10-20min; then, a Ti target power supply is turned on at the same time, the DC mode is adopted, the DC current is 120 A, the air pressure of the vacuum chamber is kept at 1.0 Pa, the bias value is -1000 V, and the workpiece ion cleaning time is 10 min. Obtain the workpiece to be plated;

[0054] 3) Depos...

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Abstract

The invention discloses a wear-resistant TiSiCN nano-composite multilayer coating and a preparation method thereof, Ar ion glow cleaning and Ti ion cleaning are firstly performed on a substrate in a vacuum chamber of coating equipment, then a transition layer is deposited on the substrate, and finally, the transition layer is alternately and periodically coated with nano-composite TiSiCN multilayer coatings, so that the wear-resistant TiSiCN nano-composite multilayer coating is obtained. The mechanical wear resistance and the high-temperature oxidation resistance of the TiSiCN nano-composite multi-layer coating deposited on the substrate are greatly improved, the requirement of modern industry for better performance of materials can be met, and the TiSiCN nano-composite multi-layer coating has huge market potential and use value and has the advantages of being simple in process, high in deposition speed, low in cost, high in film-substrate bonding strength and the like.

Description

technical field [0001] The invention relates to the technical field of hard coating preparation, in particular to a wear-resistant TiSiCN nanocomposite multi-layer coating and a preparation method thereof. Background technique [0002] The physical vapor deposition method is used to deposit a hard coating on the surface of the material without affecting the structural properties of the material, which can effectively improve the hardness, wear resistance and high temperature oxidation resistance of the material, and greatly prolong the service life of the material. In the early stage, it was mainly TiN and TiC coatings, which had high resistance to mechanical wear, abrasive wear and low coefficient of friction, but the coatings had low high temperature oxidation resistance. [0003] At present, there are multi-component coatings that add Cr, Al and other elements to the TiN coating to form multi-component coatings, such as TiCrN, TiAlN coatings, which have higher mechanical ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/32C23C14/16C23C14/06C23C14/02
CPCC23C14/325C23C14/16C23C14/0635C23C14/0641C23C14/0664C23C14/0021C23C14/022
Inventor 马英鹤杨建国朱剑豪贺艳明郑文健李华鑫闾川阳任森栋
Owner ZHEJIANG UNIV OF TECH
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