Optical sensor based on surface lattice resonance and testing method thereof

An optical sensor, lattice technology, applied in transmittance measurement and other directions, can solve the problems of weakening SLR local field strength and increasing bandwidth, etc.

Pending Publication Date: 2022-07-01
CHANGZHOU INST OF MECHATRONIC TECH
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  • Abstract
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Problems solved by technology

However, substrate effects weaken the local field strength of the SLR and increase its bandwidth
In addition, the inherent loss characteristics of metal materials will also limit its further development in SLR sensors. For example, a refractive index sensor of gold nanoparticle arrays placed directly on a quartz substrate, because of its wide SLR bandwidth, the quality factor is only for 25 [P. Offermans, M.C. Schaafsma, S.R.K. Rodriguez, Y. Zhang, M. Crego-calama, S.H. Brongersma, and J.G. Rivas, "Universal Scaling of the Figure of Merit of Plasmonic Sensor", ACS Nano (2011) 5(6) ,5151-5157]

Method used

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  • Optical sensor based on surface lattice resonance and testing method thereof
  • Optical sensor based on surface lattice resonance and testing method thereof
  • Optical sensor based on surface lattice resonance and testing method thereof

Examples

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Embodiment 1

[0037] like figure 1 , 2 As shown, an optical sensor based on surface lattice resonance consists of a quartz substrate and a silicon / silicon dioxide nanopillar dimer array on the quartz substrate; the silicon / silicon dioxide nanopillar dimer array is composed of silicon / Silica nanopillar dimer is periodically and uniformly arranged; the silicon / silicon dioxide nanopillar dimer includes two spaced silicon / silicon dioxide nanopillars, the silicon / silicon dioxide nanopillar The nano-columns include silicon nano-columns 2 and silicon dioxide nano-columns 3 arranged in sequence from top to bottom.

[0038] The diameters of the two silicon / silicon dioxide nanopillars in the silicon / silicon dioxide nanopillar dimer are both 80 nm, and the height H1 of silicon nanopillar 2 is 100 nm; the height H2 of silicon dioxide nanopillar 3 is 900 nm; The center-to-center distance L between two silicon / silicon dioxide nanopillars in the silica nanopillar dimer is 90 nm; the period P of the arr...

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Abstract

The invention discloses an optical sensor based on surface lattice resonance and a testing method thereof. The optical sensor based on surface lattice resonance comprises a substrate and a silicon / silicon dioxide nanorod dimer array located on the substrate. Wherein the silicon / silicon dioxide nanorod dimer array is formed by periodically and uniformly arranging silicon / silicon dioxide nanorod dimers; the silicon / silicon dioxide nanorod dimer comprises two silicon / silicon dioxide nanorods which are arranged at an interval. The surface lattice resonance of the optical sensor based on the surface lattice resonance can be adjusted, and the surface lattice resonance has a narrow bandwidth and a highly enhanced local electromagnetic field, so that the sensing sensitivity and the quality factor can be effectively enhanced.

Description

technical field [0001] The invention relates to an optical sensor based on surface lattice resonance and a testing method thereof. Background technique [0002] Plasmonic surface lattice resonance (SLR) is a high quality factor resonance mode generated by the coupling of localized surface plasmon resonance of metal nanoparticles and array surface diffracted waves in periodic arrays of metal nanoparticles. SLR can well localize the incident field energy in the array structure, effectively suppress the radiation loss of the system, and significantly increase the localized electromagnetic field intensity. SLRs can be applied to optical sensors because their localized fields are very sensitive to changes in the refractive index of the surrounding medium. The sensing performance of SLR-based sensors is mainly determined by sensitivity and quality factor. Generally speaking, increasing the sensitivity requires increasing the local field strength of the SLR; increasing the qualit...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/59
CPCG01N21/59G01N2021/5903
Inventor 黄小丹季小峰钱月霞马慧姝王诗军
Owner CHANGZHOU INST OF MECHATRONIC TECH
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