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Liquid-gas dual-state Mini/Micro LED chip mass transfer crystal film and manufacturing method thereof

A production method, liquid gas technology, applied in semiconductor/solid-state device manufacturing, electrical components, semiconductor devices, etc., can solve the problems of crystal film material waste, uneven chip drop, pollution of the working environment, etc., to avoid the difficulty of falling posture control, achieve repeated use, and avoid uneven viscosity changes

Pending Publication Date: 2022-07-05
BEIJING INSTITUTE OF PETROCHEMICAL TECHNOLOGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, it is difficult to control the ablation process of the peeling layer, and it is easy to cause defects such as uneven chip drop, inaccurate position, and pollution of the working environment, and the crystal film cannot be reused, resulting in serious waste of crystal film materials.

Method used

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  • Liquid-gas dual-state Mini/Micro LED chip mass transfer crystal film and manufacturing method thereof
  • Liquid-gas dual-state Mini/Micro LED chip mass transfer crystal film and manufacturing method thereof
  • Liquid-gas dual-state Mini/Micro LED chip mass transfer crystal film and manufacturing method thereof

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Effect test

Embodiment 1

[0043] like figure 1 As shown, a liquid-gas dual-state Mini / Micro LED chip mass transfer crystal film consists of a substrate 1, a medium storage grid 2, a liquid-gas dual-state medium 3, a sealant 4, an elastic layer 5 and an adhesive layer 6 composition. It is characterized in that: the substrate 1 is located above the medium storage grid 2, the liquid-gas dual-state medium 3, the sealant 4, the elastic layer 5 and the adhesive layer 6, and the medium storage grid 2, the liquid-gas dual-state medium 3 and the sealing The glue 4 is located below the substrate 1 and above the elastic layer 5, the medium storage grid 2 is laid on the lower surface of the substrate 1, the liquid-gas two-state medium 3 is distributed in the medium storage grid 2, and the sealant 4 is located in the medium storage grid 2. On the radial outer side of the grid 2 and the liquid-gas dual-state medium 3, the substrate 1, the sealant 4 and the elastic layer 5 form a closed space, and the medium storage...

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Abstract

The invention discloses a liquid-gas dual-state Mini / Micro LED chip mass transfer crystal film and a manufacturing method thereof. The liquid-gas dual-state Mini / Micro LED chip mass transfer crystal film comprises a substrate, a medium storage grid, a liquid-gas dual-state medium, a sealant, an elastic layer and a bonding layer, by means of the characteristics that a liquid-gas dual-state medium is easy to heat and low in boiling point and the viscosity of a bonding layer is obviously reduced after being heated, laser matched with an absorption pattern of the liquid-gas dual-state medium penetrates through a substrate to irradiate the liquid-gas dual-state medium so that the liquid-gas dual-state medium can be gasified to generate bubbles, a chip is pushed to be transferred to a target substrate, and mass transfer of the chip is achieved. Compared with the existing heat release and ablation release, the method has the advantages that the repeated utilization of the crystal film and the high-precision mass transfer of the chip can be realized under the conditions of environment-friendly temperature and no pollutant generation.

Description

technical field [0001] The invention relates to a mass transfer technology of micro-light-emitting diodes, in particular to a liquid-gas two-state Mini / MicroLED chip mass transfer crystal film and a manufacturing method. Background technique [0002] Vision is the main channel for humans to obtain information. Studies have shown that among the information obtained by various sensory organs, vision accounts for 60%, hearing accounts for 20%, touch accounts for 15%, taste accounts for 3%, and smell accounts for 2%, of which nearly 2 / 3 The effective information is transmitted efficiently and with high quality through display technology. The birth of electronic display screens has changed the way of carrying and transmitting visual information, supporting the development of the modern information society. From simple traffic lights and digital tube displays to complex images, TV broadcasts, to virtual reality (VR) and augmented reality (AR), displays have penetrated into all as...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/683H01L33/00
CPCH01L21/6836H01L33/005H01L2221/68304
Inventor 刘强徐杰俞建荣赵甜甜李晶盛沙王和标马宁
Owner BEIJING INSTITUTE OF PETROCHEMICAL TECHNOLOGY
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